In this paper, we investigate on the capacitance behavior of radio-frequency interdigital capacitor with single- and multi-layer graphenes, 5-μm wide and 20-μm long, grown by chemical vapor deposition. From the obtained results, the self-resonance frequency of the capacitor alone is unaffected by adding single- and multi-layer graphenes. However, the capacitor with single-layer graphenes shows a lower capacitance peak compared to the two other configurations due to an increase of overall resistance by the single-layer graphene. As a result, we find that the performance of the overall capacitor can be dependent on the resistance of graphenes.

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