The refractory metal titanium nitride is promising for high-temperature nanophotonic and plasmonic applications, but its optical properties have not been studied at temperatures exceeding 400 °C. Here, we perform in-situ high-temperature ellipsometry to quantify the permittivity of TiN films from room temperature to 1258 °C. We find that the material becomes more absorptive at higher temperatures but maintains its metallic character throughout visible and near infrared frequencies. X-ray diffraction, atomic force microscopy, and mass spectrometry confirm that TiN retains its bulk crystal quality and that thermal cycling increases the surface roughness, reduces the lattice constant, and reduces the carbon and oxygen contaminant concentrations. The changes in the optical properties of the material are highly reproducible upon repeated heating and cooling, and the room-temperature properties are fully recoverable after cooling. Using the measured high-temperature permittivity, we compute the emissivity, surface plasmon polariton propagation length, and two localized surface plasmon resonance figures of merit as functions of temperature. Our results indicate that titanium nitride is a viable plasmonic material throughout the full temperature range explored.
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6 March 2017
Research Article|
March 06 2017
Temperature-dependent optical properties of titanium nitride
Justin A. Briggs;
Justin A. Briggs
a)
1Department of Applied Physics,
Stanford University
, 348 Via Pueblo, Stanford, California 94305, USA
2Department of Materials Science and Engineering,
Stanford University
, 496 Lomita Mall, Stanford, California 94305, USA
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Gururaj V. Naik;
Gururaj V. Naik
3Department of Electrical and Computer Engineering,
Rice University
, MS-378, Houston, Texas 77251-1892, USA
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Yang Zhao;
Yang Zhao
2Department of Materials Science and Engineering,
Stanford University
, 496 Lomita Mall, Stanford, California 94305, USA
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Trevor A. Petach;
Trevor A. Petach
4Department of Physics,
Stanford University
, 382 Via Pueblo, Stanford, California 94305, USA
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Kunal Sahasrabuddhe;
Kunal Sahasrabuddhe
1Department of Applied Physics,
Stanford University
, 348 Via Pueblo, Stanford, California 94305, USA
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David Goldhaber-Gordon;
David Goldhaber-Gordon
4Department of Physics,
Stanford University
, 382 Via Pueblo, Stanford, California 94305, USA
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Nicholas A. Melosh;
Nicholas A. Melosh
2Department of Materials Science and Engineering,
Stanford University
, 496 Lomita Mall, Stanford, California 94305, USA
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Jennifer A. Dionne
Jennifer A. Dionne
2Department of Materials Science and Engineering,
Stanford University
, 496 Lomita Mall, Stanford, California 94305, USA
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a)
Author to whom correspondence should be addressed. Electronic mail: jabriggs@stanford.edu
Appl. Phys. Lett. 110, 101901 (2017)
Article history
Received:
January 20 2017
Accepted:
February 19 2017
Citation
Justin A. Briggs, Gururaj V. Naik, Yang Zhao, Trevor A. Petach, Kunal Sahasrabuddhe, David Goldhaber-Gordon, Nicholas A. Melosh, Jennifer A. Dionne; Temperature-dependent optical properties of titanium nitride. Appl. Phys. Lett. 6 March 2017; 110 (10): 101901. https://doi.org/10.1063/1.4977840
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