3D direct laser writing based on two-photon polymerization is considered as a tool to fabricate tailored probes for atomic force microscopy. Tips with radii of 25 nm and arbitrary shape are attached to conventionally shaped micro-machined cantilevers. Long-term scanning measurements reveal low wear rates and demonstrate the reliability of such tips. Furthermore, we show that the resonance spectrum of the probe can be tuned for multi-frequency applications by adding rebar structures to the cantilever.
References
1.
E.
Meyer
, H. J.
Hug
, and R.
Bennewitz
, Scanning Probe Microscopy–The Lab on a Tip
(Springer-Verlag
, Heidelberg
, 2004
).2.
P.
Eaton
and P.
West
, Atomic Force Microscopy
(Oxford University Press
, Oxford
, 2010
).3.
U. D.
Schwarz
, H.
Haefke
, P.
Reimann
, and H. J.
Güntherodt
, J. Microsc.
173
, 183
(1994
).4.
G.
Dai
, H.
Wolff
, F.
Pohlenz
, H.-U.
Danzebrink
, and G.
Wilkening
, Appl. Phys. Lett.
88
, 171908
(2006
).5.
O.
Sahin
, S.
Magonov
, C.
Su
, C. F.
Quate
, and O.
Solgaard
, Nat. Nanotechnol.
2
, 507
(2007
).6.
S. D.
Solares
and H.
Hölscher
, J. Vac. Sci. Technol., B
28
, C4E1
(2010
).7.
S. D.
Solares
and H.
Hölscher
, Nanotechnology
21
, 075702
(2010
).8.
O.
Wolter
, T.
Bayer
, and J.
Greschner
, J. Vac. Sci. Technol., B
9
, 1353
(1991
).9.
L. H.
Mak
, M.
Knoll
, D.
Weiner
, A.
Gorschlüter
, A.
Schirmeisen
, and H.
Fuchs
, Rev. Sci. Instrum.
77
, 046104
(2006
).10.
J.-E.
Schmutz
, M. M.
Schäfer
, and H.
Hölscher
, Rev. Sci. Instrum.
79
, 026103
(2008
).11.
F. J.
Giessibl
, Appl. Phys. Lett.
73
, 3956
(1998
).12.
M.
Tortonese
, R. C.
Barrett
, and C. F.
Quate
, Appl. Phys. Lett.
62
, 834
(1993
).13.
S.
Hafizovic
, D.
Barrettino
, T.
Volden
, J.
Sedivy
, K. U.
Kirstein
, O.
Brand
, and A.
Hierlemann
, Proc. Natl. Acad. Sci. U. S. A.
101
, 17011
(2004
).14.
A.
Tavassolizadeh
, T.
Meier
, K.
Rott
, G.
Reiss
, E.
Quandt
, H.
Hölscher
, and D.
Meyners
, Appl. Phys. Lett.
102
, 153104
(2013
).15.
J.
Falter
, M.
Stiefermann
, G.
Langewisch
, P.
Schurig
, H.
Hölscher
, H.
Fuchs
, and A.
Schirmeisen
, Beilstein J. Nanotechnol.
5
, 507
(2014
).16.
J. M.
Kim
and H.
Maramatsu
, Nano Lett.
5
, 309
(2005
).17.
W.-S.
Kim
, K.-M.
Park
, J. J.
Park
, S.-M.
Chang
, I.-H.
Kim
, H.
Muramatsu
, and J. M.
Kim
, Curr. Appl. Phys.
7
, 528
(2007
).18.
B. J.
Jung
, H. J.
Kong
, Y.-H.
Cho
, C. H.
Park
, M. K.
Kim
, B. G.
Jeon
, D.-Y.
Yang
, and K.-S.
Lee
, Curr. Appl. Phys.
13
, 2064
(2013
).19.
J. S.
Lee
, J.
Song
, S. O.
Kim
, S.
Kim
, W.
Lee
, J. A.
Jackman
, D.
Kim
, N.-J.
Cho
, and J.
Lee
, Nat. Commun.
7
, 11566
(2016
).20.
S.
Sharma
, A.
Sharma
, Y.-K.
Cho
, and M.
Madou
, ACS Appl. Mater. Interfaces
4
, 34
(2012
).21.
J.
Bauer
, A.
Schroer
, R.
Schwaiger
, and O.
Kraft
, Nat. Mater.
15
, 438
–443
(2016
).22.
O.
Schueller
, S. T.
Brittain
, C.
Marzolin
, and G. M.
Whitesides
, Chem. Mater.
9
, 1399
(1997
).23.
S.
Sharma
and M.
Madou
, Bioinspired, Biomimetic Nanobiomater.
1
, 252
(2012
).24.
J.
Bauer
, A.
Schroer
, R.
Schwaiger
, I.
Tesari
, C.
Lange
, L.
Valdevit
, and O.
Kraft
, Extreme Mech. Lett.
3
, 105
(2015
).25.
B.
Bhushan
and K. J.
Kwak
, Appl. Phys. Lett.
91
, 163113
(2007
).26.
N. F.
Martinez
, S.
Patil
, J. R.
Lozano
, and R.
Garcia
, Appl. Phys. Lett.
89
, 153115
(2006
).27.
R.
Proksch
, Appl. Phys. Lett.
89
, 113121
(2006
).28.
D.
Ebeling
and S. D.
Solares
, Nanotechnology
24
, 135702
(2013
).29.
J.
Hossenlopp
, L.
Jiang
, R.
Cernosek
, and F.
Josse
, J. Polym. Sci.: Polym.
42
, 2373
(2004
).© 2016 Author(s).
2016
Author(s)
You do not currently have access to this content.
