We present a microelectromechanical system, in which a silicon beam is attached to a comb-drive actuator, which is used to tune the tension in the silicon beam and thus its resonance frequency. By measuring the resonance frequencies of the system, we show that the comb-drive actuator and the silicon beam behave as two strongly coupled resonators. Interestingly, the effective coupling rate (∼1.5 MHz) is tunable with the comb-drive actuator (+10%) as well as with a side-gate (−10%) placed close to the silicon beam. In contrast, the effective spring constant of the system is insensitive to either of them and changes only by ±0.5%. Finally, we show that the comb-drive actuator can be used to switch between different coupling rates with a frequency of at least 10 kHz.
References
1.
D.
Culler
, D.
Estrin
, and M.
Srivastava
, Computer
37
, 41
(2004
).2.
M.
Mori
, “Fast response micro-safing sensor for air bag systems
,” SAE
Technical Paper 1999-01-0758, 1999
.3.
F.
Tabak
, E.
Disseldorp
, G.
Wortel
, A.
Katan
, M.
Hesselberth
, T.
Oosterkamp
, J.
Frenken
, and W.
van Spengen
, Ultramicroscopy
110
, 599
(2010
).4.
E.
Disseldorp
, F.
Tabak
, A.
Katan
, M.
Hesselberth
, T.
Oosterkamp
, J.
Frenken
, and W.
van Spengen
, Rev. Sci. Instrum.
81
, 043702
(2010
).5.
C.
Martin-Olmos
, H.
Rasool
, B.
Weiller
, and J.
Gimzewski
, ACS Nano
7
, 4164
(2013
).6.
K.
Schwab
and M.
Roukes
, Phys. Today
58
(7
), 36
(2005
).7.
M.
Wallquist
, K.
Haetermmerer
, P.
Rabl
, M.
Lukin
, and P.
Zoller
, Phys. Scr.
2009
, 014001
.8.
J.
Eisert
, M.
Plenio
, S.
Bose
, and J.
Hartley
, Phys. Rev. Lett.
93
, 190402
(2004
).9.
L.
Yang
, T.
Huang
, and P.
Chang
, Sens. Actuators, A
90
, 148
(2001
).10.
V.
Gouttenoire
, T.
Barois
, S.
Perisanu
, J.-L.
Leclercq
, S. T.
Purcell
, P.
Vincent
, and A.
Ayari
, Small
6
, 1060
(2010
).11.
B.
Piekarski
, D.
DeVoe
, M.
Dubey
, R.
Kaul
, and J.
Conrad
, Sens. Actuators, A
91
, 313
(2001
).12.
13.
R.
Karabalin
, R.
Lifshitz
, M.
Cross
, M.
Matheny
, S.
Masmanidis
, and M.
Roukes
, Phys. Rev. Lett.
106
, 094102
(2011
).14.
C.
Tsai
, W.
Kuo
, C.
Lin
, and T.
Chen
, J. Micromech. Microeng.
18
, 045001
(2008
).15.
A.
Cleland
and M.
Roukes
, Appl. Phys. Lett.
69
, 2653
(1996
).16.
C.
Nguyen
, V.
Gutnik
, and R.
Howe
, U.S. patent 5,839,062 (17 November 1998
).17.
K.
Ekinci
, Y.
Yang
, X.
Huang
, and M.
Roukes
, Appl. Phys. Lett.
81
, 2253
(2002
).18.
E.
Buks
and M. L.
Roukes
, J. Microelectromech. Syst.
11
, 802
(2002
).19.
D.
Zhu
, M. J.
Tudor
, and S. P.
Beeby
, Meas. Sci. Technol.
21
, 022001
(2010
).20.
V. R.
Challa
, M.
Prasad
, Y.
Shi
, and F. T.
Fisher
, Smart Mater. Struct.
17
, 015035
(2008
).21.
Y.
Lei
, J.
Sun
, and X.
Gong
, Physica B
461
, 61
(2015
).22.
S. Y.
No
, A.
Hashimura
, S.
Pourkamali
, and F.
Ayazi
, in Proceedings of the Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head
(Citeseer
, 2002
), pp. 281
–284
.23.
G.
Piazza
, R.
Abdolvand
, G. K.
Ho
, and F.
Ayazi
, Sens. Actuators, A: Phys.
111
, 71
(2004
).24.
B.
Lassagne
, D.
Garcia-Sanchez
, A.
Aguasca
, and A.
Bachtold
, Nano Lett.
8
, 3735
(2008
).25.
D.
Grogg
, M.
Mazza
, D.
Tsamados
, and A. M.
Ionescu
, in 2008 Electron Devices Meeting
(IEEE, 2008).26.
Y.
Sun
, S.
Thompson
, and T.
Nishida
, J. Appl. Phys.
101
, 104503
(2007
).27.
D.
Li
, Y.
Wu
, P.
Kim
, L.
Shi
, P.
Yang
, and A.
Majumdar
, Appl. Phys. Lett.
83
, 2934
(2003
).28.
R.
Lifshitz
and M. L.
Roukes
, Phys. Rev. B
61
, 5600
(2000
).29.
W.
Tang
, T.
Nguyen
, M.
Judy
, and R.
Howe
, Sens. Actuators, A: Phys.
21
, 328
(1990
).30.
L.
Lin
, C.
Nguyen
, R.
Howe
, and A.
Pisano
, “Micro electromechanical filters for signal processing
,” in 5th IEEE Micro Electro Mechanical Systems Workshop (MEMS 92), Travemuende, Germany, 4–7 February 1992
(IEEE, 1992
), pp. 226
–231
.31.
S.
Su
, H.
Yang
, and A.
Agogino
, IEEE Sens. J.
5
, 1214
(2005
).32.
A. P.
Lee
and A. P.
Pisano
, J. Microelectromech. Syst.
1
, 70
(1992
).33.
E. J.
Garcia
and J. J.
Sniegowski
, in Proceedings of the 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX, Transducers' 95
(IEEE, 1995
), Vol. 1
, pp. 365
–368
.34.
M.
Saif
, J. Microelectromech. Syst.
9
, 157
(2000
).35.
M.
Sulfridge
, T.
Saif
, N.
Miller
, and M.
Meinhart
, J. Microelectromech. Syst.
13
, 725
(2004
).36.
M.
Spletzer
, A.
Raman
, A. Q.
Wu
, X.
Xu
, and R.
Reifenberger
, Appl. Phys. Lett.
88
, 254102
(2006
).37.
H.
Okamoto
, N.
Kitajima
, K.
Onomitsu
, R.
Kometani
, S.-I.
Warisawa
, S.
Ishihara
, and H.
Yamaguchi
, Appl. Phys. Lett.
98
, 014103
(2011
).38.
S.-B.
Shim
, M.
Imboden
, and P.
Mohanty
, Science
316
, 95
(2007
).39.
R.
Karabalin
, M.
Cross
, and M.
Roukes
, Phys. Rev. B
79
, 165309
(2009
).40.
T.
Faust
, J.
Rieger
, M. J.
Seitner
, P.
Krenn
, J. P.
Kotthaus
, and E. M.
Weig
, Phys. Rev. Lett.
109
, 037205
(2012
).41.
S. C.
Masmanidis
, R. B.
Karabalin
, I.
De Vlaminck
, G.
Borghs
, M. R.
Freeman
, and M. L.
Roukes
, Science
317
, 780
(2007
).42.
H.
Okamoto
, A.
Gourgout
, C.-Y.
Chang
, K.
Onomitsu
, I.
Mahboob
, E. Y.
Chang
, and H.
Yamaguchi
, Nat. Phys.
9
, 480
(2013
).43.
S.
Barzanjeh
and D.
Vitali
, Phys. Rev. A
93
, 033846
(2016
).44.
M.
Sato
, B.
Hubbard
, A.
Sievers
, B.
Ilic
, D.
Czaplewski
, and H.
Craighead
, Phys. Rev. Lett.
90
, 044102
(2003
).45.
M.
Spletzer
, A.
Raman
, H.
Sumali
, and J. P.
Sullivan
, Appl. Phys. Lett.
92
, 114102
(2008
).46.
H.
Okamoto
, T.
Kamada
, K.
Onomitsu
, I.
Mahboob
, and H.
Yamaguchi
, Appl. Phys. Express
2
, 062202
(2009
).47.
S.
Pourkamali
and F.
Ayazi
, Sens. Actuators, A
122
, 307
(2005
).48.
I.
Mahboob
and H.
Yamaguchi
, Nat. Nanotechnol.
3
, 275
(2008
).49.
P. R.
Patterson
, D.
Hah
, H.
Nguyen
, H.
Toshiyoshi
, R.-M.
Chao
, and M. C.
Wu
, in Proceedings of the Fifteenth IEEE International Conference on Micro Electro Mechanical Systems
(IEEE, 2002
), pp. 544
–547
.50.
R.
Legtenberg
, A.
Groeneveld
, and M.
Elwenspoek
, J. Micromech. Microeng.
6
, 320
(1996
).51.
Y.
Sun
, S. N.
Fry
, D.
Potasek
, D. J.
Bell
, and B. J.
Nelson
, J. Microelectromech. Syst.
14
, 4
(2005
).52.
R.
Knobel
, C.
Yung
, and A.
Cleland
, Appl. Phys. Lett.
81
, 532
(2002
).53.
V.
Sazonova
, Y.
Yaish
, H.
Üstünel
, D.
Roundy
, T. A.
Arias
, and P.
McEuen
, Nature
431
, 284
(2004
).54.
V.
Sazonova
, Ph.D. thesis, Cornell University
, 2006
.55.
R.
Lifshitz
and M.
Cross
, Nonlinear Dynamics of Nanosystems
(Wiley-VCH Verlag GmbH & Co. KGaA
, 2010
), pp. 221
–266
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