We demonstrate high quality-factor 1.5 mm diameter batch-fabricated microcrystalline diamond cylindrical resonators (CR) with quality-factors limited by thermoelastic damping (TED) and surface loss. Resonators were fabricated 2.6 and 5.3 μm thick in-situ boron-doped microcrystalline diamond films deposited using hot filament chemical vapor deposition. The quality-factor (Q) of as-fabricated CR's was found to increase with the resonator diameter and diamond thickness. Annealing the CRs at 700 °C in a nitrogen atmosphere led to a three-fold increase in Q, a result we attribute to thinning of the diamond layer via reaction with residual O2 in the annealing furnace. Post-anneal Q exceeding 0.5 million (528 000) was measured at the 19 kHz elliptical wineglass modes, producing a ring-down time of 8.9 s. A model for Q versus diamond thickness and resonance frequency is developed including the effects of TED and surface loss. Measured quality factors are shown to agree with the predictions of this model.
Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million
Daisuke Saito, Chen Yang, Amir Heidari, Hadi Najar, Liwei Lin, David A. Horsley; Microcrystalline diamond cylindrical resonators with quality-factor up to 0.5 million. Appl. Phys. Lett. 1 February 2016; 108 (5): 051904. https://doi.org/10.1063/1.4939622
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