Formation of domain structure by electron beam irradiation in congruent lithium niobate covered by surface dielectric layer with planar and channel waveguides produced by Soft Proton Exchange (SPE) process has been studied. Formation of domains with arbitrary shapes as a result of discrete switching has been revealed. The fact was attributed to ineffective screening of depolarization field in the crystals with a surface layer modified by SPE process. The dependences of the domain sizes on the dose and the distance between irradiated areas have been revealed. Finally, we have demonstrated that electron beam irradiation of lithium niobate crystals with surface resist layer can produce high quality periodical domain patterns after channel waveguide fabrication. Second harmonic generation with normalized nonlinear conversion efficiency up to 48%/(W cm2) has been achieved in such waveguides.
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