The presence of spurious peaks in the amplitude-frequency response of diamond based piezoelectric layered structure was shown. Excitation of such peaks results in deterioration of an useful acoustical signal. It was shown that such spurious peaks should be associated with Lamb waves in a layered structure. By means of FEM analysis, the propagation of acoustic waves of different types in the piezoelectric layered structure “Al/AlN/Mo/(100) diamond” has been investigated in detail. By analyzing the elastic displacement patterns at frequencies from 0 up to 250 MHz, a set of all the possible acoustic waves, especially Lamb modes, have been studied, and dispersive curves of phase velocity have been plotted. A revised classification of Lamb modes has been introduced.

1.
E.
Iborra
,
M.
Clement
,
J.
Capilla
,
J.
Olivares
, and
V.
Felmetsger
,
Thin Solid Films
520
,
3060
(
2012
).
2.
T.
Mirea
,
M.
DeMiguel-Ramos
,
M.
Clement
,
J.
Olivares
,
E.
Iborra
,
V.
Yantchev
, and
I.
Katardjiev
, in
Proceedings of the 2014 IEEE International Ultrasonics Symposium, Chicago, IL, USA, 3–6 September 2014
(
IEEE
,
2014
), pp.
1524
1527
.
3.
K. M.
Lakin
,
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
52
,
707
(
2005
).
4.
G. M.
Kvashnin
,
A. V.
Telichko
, and
B. P.
Sorokin
, in
Proceedings of the 2015 Joint Conference of the IEEE International Frequency Control Symposium & the European Frequency and Time Forum, Denver, CO, USA, 12–16 April 2015
(
IEEE
,
2015
), pp.
396
401
.
5.
J.
Kaitila
,
M.
Ylilammi
,
J.
Ellä
, and
R.
Aigner
, in
Proceedings of the 2003 IEEE International Ultrasonics Symposium, Honolulu, HA, USA, 5–8 October 2003
(
IEEE
,
2003
), pp.
84
87
.
6.
K.
Kokkonen
,
T.
Pensala
,
J.
Meltaus
, and
M.
Kaivola
,
Appl. Phys. Lett.
96
,
173502
(
2010
).
7.
V. I.
Anisimkin
,
I. E.
Kuznetsova
,
V. V.
Kolesov
,
I. I.
Pyataikin
,
V. V.
Sorokin
, and
D. A.
Skladnev
,
Ultrasonics
62
,
156
(
2015
).
8.
D. S.
Ballantine
,
R. M.
White
,
S. J.
Martin
,
A. J.
Ricco
,
E. T.
Zeller
,
G. C.
Frye
, and
H.
Wohltjen
,
Acoustic Wave Sensors: Theory, Design, & Physico-Chemical Applications
(
Academic Press
,
San Diego
,
1997
), p.
436
.
9.
X.
Lu
,
K.
China
,
J.
Ma
,
C. P.
Yue
, and
K. M.
May
,
IEEE Microwave Wireless Compon. Lett.
23
,
318
(
2013
).
10.
H.
Lamb
,
Proc. R. Soc. London, Ser. A
93
,
114
(
1917
).
11.
D. C.
Worlton
,
J. Appl. Phys.
32
,
967
(
1961
).
12.
I. A.
Viktorov
,
Rayleigh and Lamb Waves: Physical Theory and Applications
(
Springer
,
New York
,
1967
), p.
154
.
13.
H.
Gravenkamp
,
Ch.
Song
, and
J.
Prager
,
J. Sound Vib.
331
,
2543
(
2012
).
14.
M.
Grossmann
,
O.
Ristow
,
M.
Hettich
,
Ch.
He
,
R.
Waitz
,
E.
Scheer
,
V.
Gusev
,
T.
Dekorsy
, and
M.
Schubert
,
Appl. Phys. Lett.
106
,
171904
(
2015
).
15.
V.
Blank
,
M.
Popov
,
N.
Lvova
,
K.
Gogolinsky
, and
V.
Reshetov
,
J. Mater. Res.
12
,
3109
(
1997
).
16.
B. P.
Sorokin
,
G. M.
Kvashnin
,
M. S.
Kuznetsov
,
A. V.
Telichko
, and
S. I.
Burkov
, in
Proceedings of the 2012 IEEE International Ultrasonics Symposium, Dresden, Germany, 7–10 October 2012
(
IEEE
,
2012
), pp.
763
766
.
17.
B. P.
Sorokin
,
G. M.
Kvashnin
,
A. P.
Volkov
,
V. S.
Bormashov
,
V. V.
Aksenenkov
,
M. S.
Kuznetsov
,
G. I.
Gordeev
, and
A. V.
Telichko
,
Appl. Phys. Lett.
102
,
113507
(
2013
).
18.
M.
Benetti
,
D.
Cannata
, and
F.
Di Pietrantonio
,
Appl. Phys. Lett.
87
,
033504
(
2005
).
19.
B. P.
Sorokin
,
G. M.
Kvashnin
,
A. V.
Telichko
,
G. I.
Gordeev
,
S. I.
Burkov
, and
V. D.
Blank
,
Acoust. Phys.
61
,
422
(
2015
).
20.
B. D.
Zaitsev
,
I. E.
Kuznetsova
,
A. M.
Shikhabudinov
, and
A. A.
Vasiliev
,
Tech. Phys. Lett.
37
,
503
(
2011
).
21.
J. F.
Vetelino
, in
Proceedings of the 2010 IEEE International Ultrasonics Symposium, Nashville, TN, USA, 4–7 March 2010
(
IEEE
,
2010
), pp.
2269
2272
.
22.
I. A.
Borodina
,
B. D.
Zaitsev
,
I. E.
Kuznetsova
, and
A. A.
Teplykh
,
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
60
,
2677
(
2013
).
23.
A. V.
Sotnikov
,
H.
Schmidt
,
M.
Weihnacht
,
E. P.
Smirnova
,
T. Yu.
Chemekova
, and
Y. N.
Makarov
,
IEEE Trans. Ultrason. Ferroelectr. Freq. Control
57
,
808
(
2010
).
24.
G. D.
Mansfeld
,
S. G.
Alekseev
, and
I. M.
Kotelyansky
, in
Proceedings of the 2001 IEEE Ultrasonics Symposium, Atlanta, GA, USA, 7–10 October 2001
(
IEEE
,
2001
), Vol. 1, pp.
415
418
.
You do not currently have access to this content.