We report on the integration of monolayer molybdenum disulphide with silicon nitride microresonators assembled by visco-elastic layer transfer techniques. Evanescent coupling from the resonator mode to the monolayer is confirmed through measurements of cavity transmission. The absorption of the monolayer semiconductor flakes in this geometry is determined to be 850 dB/cm, which is larger than that of graphene and black phosphorus with the same thickness. This technique can be applied to diverse monolayer semiconductors for assembling hybrid optoelectronic devices such as photodetectors and modulators operating over a wide spectral range.

1.
S.
Assefa
,
S.
Shank
,
W.
Green
,
M.
Khater
,
E.
Kiewra
,
C.
Reinholm
,
S.
Kamlapurkar
,
A.
Rylyakov
,
C.
Schow
,
F.
Horst
 et al,
IEEE Int. Electron Devices Meet.
33
,
31
33
(
2012
).
2.
M.
Liu
,
X.
Yin
,
E.
Ulin-Avila
,
B.
Geng
,
T.
Zentgraf
,
L.
Ju
,
F.
Wang
, and
X.
Zhang
,
Nature
474
,
64
(
2011
).
3.
X.
Wang
,
Z.
Cheng
,
K.
Xu
,
H. K.
Tsang
, and
J.-B.
Xu
,
Nat. Photonics
7
,
888
(
2013
).
4.
X.
Gan
,
R.-J.
Shiue
,
Y.
Gao
,
I.
Meric
,
T. F.
Heinz
,
K.
Shepard
,
J.
Hone
,
S.
Assefa
, and
D.
Englund
,
Nat. Photonics
7
,
883
(
2013
).
5.
Q. H.
Wang
,
K.
Kalantar-Zadeh
,
A.
Kis
,
J. N.
Coleman
, and
M. S.
Strano
,
Nat. Nanotechnol.
7
,
699
(
2012
).
6.
F.
Xia
,
H.
Wang
,
D.
Xiao
,
M.
Dubey
, and
A.
Ramasubramaniam
,
Nat. Photonics
8
,
899
(
2014
).
7.
B.
Radisavljevic
,
A.
Radenovic
,
J.
Brivio
,
V.
Giacometti
, and
A.
Kis
,
Nat. Nanotechnol.
6
,
147
(
2011
).
8.
O.
Lopez-Sanchez
,
D.
Lembke
,
M.
Kayci
,
A.
Radenovic
, and
A.
Kis
,
Nat. Nanotechnol.
8
,
497
(
2013
).
9.
A.
Geim
and
I.
Grigorieva
,
Nature
499
,
419
(
2013
).
10.
X.
Wang
and
F.
Xia
,
Nat. Mater.
14
,
264
(
2015
).
11.
D.
Xiao
,
G.-B.
Liu
,
W.
Feng
,
X.
Xu
, and
W.
Yao
,
Phys. Rev. Lett.
108
,
196802
(
2012
).
12.
X.
Liu
,
T.
Galfsky
,
Z.
Sun
,
F.
Xia
,
E.-C.
Lin
,
Y.-H.
Lee
,
S.
Kéna-Cohen
, and
V. M.
Menon
,
Nat. Photonics
9
,
30
(
2015
).
13.
X.
Gan
,
Y.
Gao
,
K. F.
Mak
,
X.
Yao
,
R.-J.
Shiue
,
A.
van der Zande
,
M. E.
Trusheim
,
F.
Hatami
,
T. F.
Heinz
,
J.
Hone
, and
D.
Englund
,
Appl. Phys. Lett.
103
,
181119
(
2013
).
14.
S.
Wu
,
S.
Buckley
,
J. R.
Schaibley
,
L.
Feng
,
J.
Yan
,
D. G.
Mandrus
,
F.
Hatami
,
W.
Yao
,
J.
Vučković
,
A.
Majumdar
, and
X.
Xu
,
Nature
520
,
69
(
2015
).
15.
Y.
Ye
,
Z. J.
Wong
,
X.
Lu
,
H.
Zhu
,
X.
Chen
,
Y.
Wang
, and
X.
Zhang
, preprint arXiv:1503.06141 (
2015
).
16.
A.
Castellanos-Gomez
,
M.
Buscema
,
R.
Molenaar
,
V.
Singh
,
L.
Janssen
,
H. S.
van der Zant
, and
G. A.
Steele
,
2D Mater.
1
,
011002
(
2014
).
17.
N.
Gruhler
,
C.
Benz
,
H.
Jang
,
J.-H.
Ahn
,
R.
Danneau
, and
W.
Pernice
,
Opt. Express
21
,
31678
(
2013
).
18.
N.
Youngblood
,
C.
Chen
,
S. J.
Koester
, and
M.
Li
,
Nat. Photonics
9
,
247
252
(
2015
).
19.
M.
Bernardi
,
M.
Palummo
, and
J. C.
Grossman
,
Nano Lett.
13
,
3664
(
2013
).
20.
Y.
Li
,
A.
Chernikov
,
X.
Zhang
,
A.
Rigosi
,
H. M.
Hill
,
A. M.
van der Zande
,
D. A.
Chenet
,
E.-M.
Shih
,
J.
Hone
, and
T. F.
Heinz
,
Phys. Rev. B
90
,
205422
(
2014
).
21.
D. J.
Moss
,
R.
Morandotti
,
A. L.
Gaeta
, and
M.
Lipson
,
Nat. Photonics
7
,
597
(
2013
).
22.
See supplementary material at http://dx.doi.org/10.1063/1.4929779 for additional characterization data.
23.
K. F.
Mak
,
C.
Lee
,
J.
Hone
,
J.
Shan
, and
T. F.
Heinz
,
Phys. Rev. Lett.
105
,
136805
(
2010
).
24.
N.
Scheuschner
,
O.
Ochedowski
,
A.-M.
Kaulitz
,
R.
Gillen
,
M.
Schleberger
, and
J.
Maultzsch
,
Phys. Rev. B
89
,
125406
(
2014
).
25.
M.
Buscema
,
G. A.
Steele
,
H. S.
van der Zant
, and
A.
Castellanos-Gomez
,
Nano Res.
7
,
561
(
2014
).
26.
D.
Sercombe
,
S.
Schwarz
,
O.
Del Pozo-Zamudio
,
F.
Liu
,
B.
Robinson
,
E.
Chekhovich
,
I.
Tartakovskii
,
O.
Kolosov
, and
A.
Tartakovskii
,
Sci. Rep.
3
,
3489
(
2013
).
27.
A.
Splendiani
,
L.
Sun
,
Y.
Zhang
,
T.
Li
,
J.
Kim
,
C.-Y.
Chim
,
G.
Galli
, and
F.
Wang
,
Nano Lett.
10
,
1271
(
2010
).
28.
A.
Newaz
,
D.
Prasai
,
J.
Ziegler
,
D.
Caudel
,
S.
Robinson
,
R.
Haglund
, Jr.
, and
K.
Bolotin
,
Solid State Commun.
155
,
49
(
2013
).
29.
E. J.
Lenferink
,
G.
Wei
, and
N. P.
Stern
,
Opt. Express
22
,
16099
(
2014
).

Supplementary Material

You do not currently have access to this content.