In this work, we present the analytical modeling and preliminary experimental results for the choice of the optimal frequencies when performing amplitude and phase measurements with a scanning microwave microscope. In particular, the analysis is related to the reflection mode operation of the instrument, i.e., the acquisition of the complex reflection coefficient data, usually referred as S11. The studied configuration is composed of an atomic force microscope with a microwave matched nanometric cantilever probe tip, connected by a λ/2 coaxial cable resonator to a vector network analyzer. The set-up is provided by Keysight Technologies. As a peculiar result, the optimal frequencies, where the maximum sensitivity is achieved, are different for the amplitude and for the phase signals. The analysis is focused on measurements of dielectric samples, like semiconductor devices, textile pieces, and biological specimens.
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20 July 2015
Research Article|
July 22 2015
Optimization of the imaging response of scanning microwave microscopy measurements
G. M. Sardi
;
G. M. Sardi
1National Research Council,
Institute for Microelectronics and Microsystems
, Via del Fosso del Cavaliere 100, 00133 Rome, Italy
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A. Lucibello;
A. Lucibello
1National Research Council,
Institute for Microelectronics and Microsystems
, Via del Fosso del Cavaliere 100, 00133 Rome, Italy
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M. Kasper;
M. Kasper
2Biophysics Institute,
Johannes Kepler University
, Gruberstrasse 40, 4020 Linz, Austria
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G. Gramse;
G. Gramse
2Biophysics Institute,
Johannes Kepler University
, Gruberstrasse 40, 4020 Linz, Austria
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E. Proietti;
E. Proietti
1National Research Council,
Institute for Microelectronics and Microsystems
, Via del Fosso del Cavaliere 100, 00133 Rome, Italy
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F. Kienberger;
F. Kienberger
3
Keysight Technologies Austria GmbH
, Gruberstrasse 40, 4020 Linz, Austria
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R. Marcelli
R. Marcelli
a)
1National Research Council,
Institute for Microelectronics and Microsystems
, Via del Fosso del Cavaliere 100, 00133 Rome, Italy
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a)
Electronic mail: romolo.marcelli@imm.cnr.it
Appl. Phys. Lett. 107, 033107 (2015)
Article history
Received:
March 22 2015
Accepted:
July 14 2015
Citation
G. M. Sardi, A. Lucibello, M. Kasper, G. Gramse, E. Proietti, F. Kienberger, R. Marcelli; Optimization of the imaging response of scanning microwave microscopy measurements. Appl. Phys. Lett. 20 July 2015; 107 (3): 033107. https://doi.org/10.1063/1.4927385
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