This article proposes a silicon-based electrostatic kinetic energy harvester with an ultra-wide operating frequency bandwidth from 1 Hz to 160 Hz. This large bandwidth is obtained, thanks to a miniature tungsten ball impacting with a movable proof mass of silicon. The motion of the silicon proof mass is confined by nonlinear elastic stoppers on the fixed part standing against two protrusions of the proof mass. The electrostatic transducer is made of interdigited-combs with a gap-closing variable capacitance that includes vertical electrets obtained by corona discharge. Below 10 Hz, the e-KEH offers 30.6 nJ per mechanical oscillation at 2 grms, which makes it suitable for powering biomedical devices from human motion. Above 10 Hz and up to 162 Hz, the harvested power is more than 0.5 μW with a maximum of 4.5 μW at 160 Hz. The highest power of 6.6 μW is obtained without the ball at 432 Hz, in accordance with a power density of 142 μW/cm3. We also demonstrate the charging of a 47-μF capacitor to 3.5 V used to power a battery-less wireless temperature sensor node.
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21 December 2015
Research Article|
December 22 2015
A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices
Y. Lu
;
Y. Lu
1
Université Paris-Est/ESYCOM/ESIEE Paris
, Noisy-le-Grand 93162, France
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F. Cottone;
F. Cottone
a)
1
Université Paris-Est/ESYCOM/ESIEE Paris
, Noisy-le-Grand 93162, France
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S. Boisseau
;
S. Boisseau
2
CEA
, Leti, Minatec Campus, Grenoble 38054, France
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F. Marty;
F. Marty
1
Université Paris-Est/ESYCOM/ESIEE Paris
, Noisy-le-Grand 93162, France
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D. Galayko;
D. Galayko
3UPMC-Sorbonne Université/LIP 6,
CNRS
, Paris 75005, France
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a)
Present address: NIPS Laboratory, Department of Physics and Geology, University of Perugia, Perugia 06123, Italy
b)
Electronic mail: p.basset@esiee.fr
Appl. Phys. Lett. 107, 253902 (2015)
Article history
Received:
October 02 2015
Accepted:
November 30 2015
Citation
Y. Lu, F. Cottone, S. Boisseau, F. Marty, D. Galayko, P. Basset; A nonlinear MEMS electrostatic kinetic energy harvester for human-powered biomedical devices. Appl. Phys. Lett. 21 December 2015; 107 (25): 253902. https://doi.org/10.1063/1.4937587
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