Dynamic control of the asymmetric Fano resonance in side-coupled Fabry–Pérot and photonic crystal nanobeam cavities

Fano resonance is a prevailing interference phenomenon that stems from the intersection between discrete and continuum states in many fields. We theoretically and experimentally characterize the asymmetric Fano lineshape in side-coupled waveguide Fabry–Pérot and photonic crystal nanobeam cavities. The measured quality-factor of the Fano resonance before tuning is 28 100. A nanoelectromechanical systems bidirectional actuator is integrated seamlessly to control the shape of the Fano resonance through in-plane translations in two directions without sacrificing the quality-factor. The peak intensity level of the Fano resonance can be increased by 8.5 dB from 60 nW to 409 nW while the corresponding dip intensity is increased by 12.8 dB from 1 nW to 18 nW. The maximum recorded quality-factor throughout the tuning procedure is up to 32 500. Potential applications of the proposed structure include enhancing the sensitivity of sensing, reconfigurable nanophotonics devices, and on-chip intensity modulator.