We propose and experimentally demonstrate the use of Fano resonance as a means to improve the Quality factor of photonic crystal split-beam nanocavities. The Fano resonance is triggered by the interference between the second-order quasi-transverse electric resonant mode and the leaky high-order quasi-transverse electric propagation mode of the optimized photonic crystal split-beam nanocavity. Compared with a similar photonic crystal split-beam nanocavity without asymmetric Fano lineshape, the Q-factor is increased up to 3-fold: from 1.99×104 to 5.95×104. Additionally, out-of-plane tuning of the Fano resonance is investigated by means of a Nano-Electro-Mechanical Systems based actuator. The maximum centre wavelength shift of the Fano resonance reached 116.69 pm, which is more than 4.5 times the original quasi-Full Width at Half Magnitude.

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