Si pillars fabricated by focused ion beam (FIB) had been reported to have a critical size of 310–400 nm, below which their deformation behavior would experience a brittle-to-ductile transition at room temperature. Here, we demonstrated that the size-dependent transition was actually stemmed from the amorphous Si (a-Si) shell introduced during the FIB fabrication process. Once the a-Si shell was crystallized, Si pillars would behave brittle again with their modulus comparable to their bulk counterpart. The analytical model we developed has been proved to be valid in deriving the moduli of crystalline Si core and a-Si shell.
References
1.
K. E.
Petersen
, Proc. IEEE
70
, 420
(1982
).2.
A.
Blanco
, E.
Chomski
, S.
Grabtchak
, M.
Ibisate
, S.
John
, S. W.
Leonard
, C.
Lopez
, F.
Meseguer
, H.
Miguez
, and J. P.
Mondia
, Nature
405
, 437
(2000
).3.
Q.
Fang
and L.
Zhang
, J. Mater. Res.
28
, 1995
(2013
).4.
J.
Samuels
and S. G.
Roberts
, Proc. R. S. A
421
, 1
(1989
).5.
F.
Östlund
, K.
Rzepiejewska-Malyska
, K.
Leifer
, L. M.
Hale
, Y.
Tang
, R.
Ballarini
, W. W.
Gerberich
, and J.
Michler
, Adv. Funct. Mater.
19
, 2439
(2009
).6.
Y.
Zhu
, F.
Xu
, Q.
Qin
, W. Y.
Fung
, and W.
Lu
, Nano Lett.
9
, 3934
(2009
).7.
T.
Namazu
and Y.
Isono
, presented at the Sixteenth Annual International Conference on Micro Electro Mechanical Systems
, 2003
, MEMS-03 Kyoto.8.
S.
Hoffmann
, I.
Utke
, B.
Moser
, J.
Michler
, S. H.
Christiansen
, V.
Schmidt
, S.
Senz
, P.
Werner
, U.
Gösele
, and C.
Ballif
, Nano Lett.
6
, 622
(2006
).9.
M. J.
Gordon
, T.
Baron
, F.
Dhalluin
, P.
Gentile
, and P.
Ferret
, Nano Lett.
9
, 525
(2009
).10.
J.
Deneen
, W. M.
Mook
, A.
Minor
, W. W.
Gerberich
, and C. B.
Carter
, J. Mater. Sci.
41
, 4477
(2006
).11.
K.
Kang
and W.
Cai
, Int. J. Plast.
26
, 1387
(2010
).12.
S.
Shim
, H.
Bei
, M. K.
Miller
, G. M.
Pharr
, and E. P.
George
, Acta Mater.
57
, 503
(2009
).13.
R.
Maaß
, S.
Van Petegem
, H.
Van Swygenhoven
, P.
Derlet
, C.
Volkert
, and D.
Grolimund
, Phys. Rev. Lett.
99
, 145505
(2007
).14.
J.
Michler
, K.
Wasmer
, S.
Meier
, F.
Östlund
, and K.
Leifer
, Appl. Phys. Lett.
90
, 043123
(2007
).15.
Z. W.
Shan
, G.
Adesso
, A.
Cabot
, M. P.
Sherburne
, S. A.
Syed Asif
, O. L.
Warren
, D. C.
Chrzan
, A. M.
Minor
, and A. P.
Alivisatos
, Nat. Mater.
7
, 947
(2008
).16.
A.
Minor
, J.
Ye
, C.
Chisholm
, R.
Mishra
, Z.
Shan
, and O.
Warren
, Microsc. Microanal.
15
, 1184
(2009
).17.
S.
Korte
, J. S.
Barnard
, R. J.
Stearn
, and W. J.
Clegg
, Int. J. Plast.
27
, 1853
(2011
).18.
S. E.
Donnelly
, R. C.
Birtcher
, V. M.
Vishnyakov
, and G.
Carter
, Appl. Phys. Lett.
82
, 1860
(2003
).19.
I.
Jenčič
and I. M.
Robertson
, J. Mater. Res.
11
, 2152
(1996
).20.
F.
Priolo
, A.
Battaglia
, R.
Nicotra
, and E.
Rimini
, Appl. Phys. Lett.
57
, 768
(1990
).21.
M. K.
Hatalis
and D. W.
Greve
, IEEE Electron Device Lett.
8
, 361
(1987
).22.
23.
M. A.
Hopcroft
, W. D.
Nix
, and T. W.
Kenny
, J. Microelectromech. Syst.
19
, 229
(2010
).24.
R.
Maaβ
, D.
Grolimund
, S.
Van Petegem
, M.
Willimann
, M.
Jensen
, H.
Van Swygenhoven
, T.
Lehnert
, M. A. M.
Gijs
, C. A.
Volkert
, and E. T.
Lilleodden
, Appl. Phys. Lett.
89
, 151905
(2006
).25.
R.
Maaß
, S.
Van Petegem
, C. N.
Borca
, and H.
Van Swygenhoven
, Mater. Sci. Eng. A
524
, 40
(2009
).26.
F. G.
Sen
, Y.
Qi
, A. C. T.
van Duin
, and A. T.
Alpas
, Appl. Phys. Lett.
102
, 051912
(2013
).27.
Q. P.
McAllister
, K. E.
Strawhecker
, C. R.
Becker
, and C. A.
Lundgren
, J. Power Sources
257
, 380
(2014
).28.
K.
Zheng
, C.
Wang
, Y. Q.
Cheng
, Y.
Yue
, X.
Han
, Z.
Zhang
, Z.
Shan
, S. X.
Mao
, M.
Ye
, Y.
Yin
, and E.
Ma
, Nat. Commun.
1
, 24
(2010
).29.
Y.-S.
Sohn
, J.
Park
, G.
Yoon
, J.
Song
, S.-W.
Jee
, J.-H.
Lee
, S.
Na
, T.
Kwon
, and K.
Eom
, Nanoscale Res. Lett.
5
, 211
(2010
).30.
See supplementary material at http://dx.doi.org/10.1063/1.4913241 for movie S1 that recored the in situ compression of the as-FIBed Si pillar with D = 212 nm in TEM, and movie S2 of the compression of the D = 206 nm thermal-treated Si pillar inside TEM.
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