We find that monolayer epitaxial graphene devices exposed to aggressive aqueous-ozone processing and annealing became cleaner from post-fabrication organic resist residuals and, significantly, maintain their high carrier mobility. Additionally, we observe a decrease in carrier density from inherent strong n-type doping to extremely low p-type doping after processing. This transition is explained to be a consequence of the cleaning effect of aqueous-ozone processing and annealing, since the observed removal of resist residuals from SiC/G enables the exposure of the bare graphene to dopants present in ambient conditions. The resulting combination of charge neutrality, high mobility, large area clean surfaces, and susceptibility to environmental species suggest this processed graphene system as an ideal candidate for gas sensing applications.
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9 February 2015
Research Article|
February 11 2015
High mobility epitaxial graphene devices via aqueous-ozone processing
Tom Yager;
Tom Yager
a)
1Department of Microtechnology and Nanoscience,
Chalmers University of Technology
, Göteborg S-412 96, Sweden
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Matthew J. Webb;
Matthew J. Webb
a)
2Department of Chemistry–BMC,
Uppsala University
, Box 576, Uppsala S-751 23, Sweden
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Helena Grennberg;
Helena Grennberg
2Department of Chemistry–BMC,
Uppsala University
, Box 576, Uppsala S-751 23, Sweden
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Rositsa Yakimova;
Rositsa Yakimova
3Department of Physics, Chemistry and Biology (IFM),
Linköping University
, Linköping S-581 83, Sweden
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Samuel Lara-Avila;
Samuel Lara-Avila
1Department of Microtechnology and Nanoscience,
Chalmers University of Technology
, Göteborg S-412 96, Sweden
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Sergey Kubatkin
Sergey Kubatkin
1Department of Microtechnology and Nanoscience,
Chalmers University of Technology
, Göteborg S-412 96, Sweden
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Tom Yager
1,a)
Matthew J. Webb
2,a)
Helena Grennberg
2
Rositsa Yakimova
3
Samuel Lara-Avila
1
Sergey Kubatkin
1
1Department of Microtechnology and Nanoscience,
Chalmers University of Technology
, Göteborg S-412 96, Sweden
2Department of Chemistry–BMC,
Uppsala University
, Box 576, Uppsala S-751 23, Sweden
3Department of Physics, Chemistry and Biology (IFM),
Linköping University
, Linköping S-581 83, Sweden
a)
Authors to whom correspondence should be addressed. Electronic addresses: [email protected] and [email protected]
Appl. Phys. Lett. 106, 063503 (2015)
Article history
Received:
December 13 2014
Accepted:
January 30 2015
Citation
Tom Yager, Matthew J. Webb, Helena Grennberg, Rositsa Yakimova, Samuel Lara-Avila, Sergey Kubatkin; High mobility epitaxial graphene devices via aqueous-ozone processing. Appl. Phys. Lett. 9 February 2015; 106 (6): 063503. https://doi.org/10.1063/1.4907947
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