We consider laser nanostructuring of the material surface by means of a colloidal particle lens array. Here, the monolayer of dielectric micro- or nanospheres placed on the surface acts as an array of near-field lenses that focus the laser radiation into the multitude of distinct spots, allowing the formation of many structures in a single stage. We show that conversion of a small part of the energy of the femtosecond beam into the second harmonic (SH) is an efficient way to increase the surface density of obtained nanostructures. By combining the fundamental frequency and the SH, one benefits both from the power of the former and from the focusing ability of the latter. This combination provides an efficient nanostructuring with sphere diameter close to the wavelength of the second harmonic. The possibility to create arrays of nanostructures with surface density above 5×108cm2 with femtosecond Ti:sapphire laser operating at 800 nm was demonstrated by employing 0.45 μm spheres.

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