There is particular interest to investigate compositional inhomogeneity of Cu(In,Ga)Se2 solar cell absorbers. We introduce an approach in which focused ion beam prepared thin lamellas of complete solar cell devices are scanned with a highly focused synchrotron X-ray beam. Analyzing the resulting fluorescence radiation ensures high resolution compositional analysis combined with high spatial resolution. Thus, we are able to detect subtle variations of the Ga/(Ga + In) ratio down to 0.01 on a submicrometer scale. We observed that for sequentially processed solar cells a higher selenization temperature leads to absorbers with almost homogenous Ga/(Ga + In) ratio, which significantly improved the conversion efficiency.

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