In this paper, the contribution of ions in RF permittivity and electrical conductivity of atmospheric pressure micro- and sub-microgaps in both pre-breakdown and post-breakdown regimes is investigated. It is shown that ions are ignorable in post-breakdown conditions, while their role becomes significant in pre-breakdown mode especially for gaps on the right side of Paschen's curve. Also, it is demonstrated that the contribution of ions in RF properties increases by decreasing the operating frequency in comparison with ion-neutral collision frequency.
References
1.
S.
Zhang
, X.
Hu
, Z.
Jiang
, M.
Liu
, and Y.
He
, Phys. Plasmas
13
(1
), 013502
(2006
).2.
G.
Cerri
, F.
Moglie
, R.
Montesi
, P.
Russo
, and E.
Vecchioni
, IEEE Trans. Antennas Propag.
56
(8
), 2584
–2588
(2008
).3.
Y.
Wang
, C.
Yuan
, Z.
Zhou
, L.
Li
, and Y.
Du
, Phys. Plasmas
18
(11
), 113105
(2011
).4.
O.
Sakai
, T.
Sakaguchi
, and K.
Tachibana
, J. Appl. Phys.
101
(7
), 073304
(2007
).5.
A.
Semnani
and D.
Peroulis
, Electron. Lett.
50
, 1244
–1246
(2014
).6.
Y. P.
Raizer
, V. I.
Kisin
, and J. E.
Allen
, Gas Discharge Physics
(Springer-Verlag
, Berlin
, 1991
).7.
M. A.
Lieberman
and A. J.
Lichtenberg
, Principles of Plasma Discharges and Materials Processing
(Wiley-Interscience Publication
, 2005
).8.
A.
Semnani
, A.
Venkattraman
, A. A.
Alexeenko
, and D.
Peroulis
, Appl. Phys. Lett.
102
, 174102
(2013
).9.
W. S.
Boyle
and P.
Kisliuk
, Phys. Rev.
97
(2
), 255
(1955
).10.
M.
Radmilović-Radjenović
, Z. L.
Petrović
, and B.
Radjenović
, J. Phys.: Conf. Ser.
71
, 012007
(2007
).11.
M.
Radmilović-Radjenović
and B.
Radjenović
, Plasma Sources Sci. Technol.
16
(2
), 337
(2007
).12.
M.
Klas
, Š.
Matejčik
, B.
Radjenović
, and M.
Radmilović-Radjenović
, Phys. Scr.
83
(4
), 045503
(2011
).13.
F.
Iza
and J. A.
Hopwood
, IEEE Trans. Plasma Sci.
31
(4
), 782
–787
(2003
).14.
A.
Semnani
, A.
Venkattraman
, A. A.
Alexeenko
, and D.
Peroulis
, Appl. Phys. Lett.
103
(6
), 063102
(2013
).15.
X.
He
, J.
Chen
, X.
Ni
, Y.
Chen
, X.
Zeng
, and T.
Gu
, IEEE Trans. Plasma Sci.
40
(4
), 1010
–1018
(2012
).16.
G. G.
Lister
, Y. M.
Li
, and V. A.
Godyak
, J. Appl. Phys.
79
(12
), 8993
–8997
(1996
).17.
C. K.
Birdsall
, IEEE Trans. Plasma Sci.
19
(2
), 65
–85
(1991
).18.
V.
Vahedi
, G.
DiPeso
, C. K.
Birdsall
, M. A.
Lieberman
, and T. D.
Rognlien
, Plasma Sources Sci. Technol.
2
(4
), 261
(1993
).19.
A.
Venkattraman
, A.
Garg
, D.
Peroulis
, and A. A.
Alexeenko
, Appl. Phys. Lett.
100
(8
), 083503
(2012
).20.
D. B.
Go
and D. A.
Pohlman
, J. Appl. Phys.
107
(10
), 103303
(2010
).21.
J. R.
Roth
, Industrial Plasma Engineering: Volume 2-Applications to Nonthermal Plasma Processing
(CRC Press
, 2001
).© 2014 AIP Publishing LLC.
2014
AIP Publishing LLC
You do not currently have access to this content.
