This paper demonstrates the direct observation of crack initiation, crack propagation, and interfacial delamination events during in-situ microbeam bending tests of FIB milled BEOL structures. The elastic modulus and the critical force of fracture of the BEOL beam samples were compared for beams of different length and width.
References
1.
K.
Maex
, M. R.
Baklanov
, D.
Shamiryan
, F.
Iacopi
, S. H.
Brongersma
, and Z. S.
Yanovitskaya
, J. Appl. Phys.
93
(11
), 8793
–8841
(2003
).2.
K.
Vanstreels
, C.
Wu
, M.
Gonzalez
, D.
Schneider
, D.
Gidley
, P.
Verdonck
, and M. R.
Baklanov
, Langmuir
29
, 12025
–12035
(2013
).3.
E. P.
Guyer
and R. H.
Dauskardt
, in IEEE 2003 International Interconnect Technology Conference, Burlingame, CA, USA, 2–4 June 2003
(IEEE
, 2003
), pp. 89
–91
.4.
E. P.
Guyer
and R. H.
Dauskardt
, in IEEE 2004 International Interconnect Technology Conference, Burlingame, CA, USA, 7–9 June 2004
(IEEE
, 2004
), pp. 236
–238
.5.
E. P.
Guyer
and R. H.
Dauskardt
, J. Mater. Res.
20
(3
), 680
–687
(2005
).6.
E. P.
Guyer
, M.
Patz
, and R. H.
Dauskardt
, J. Mater. Res.
21
(4
), 882
–894
(2006
).7.
T.-S.
Kim
and R. H.
Dauskardt
, IEEE Trans. Device Mater. Reliab.
9
(4
), 509
–515
(2009
).8.
G.
Wang
, P. S.
Ho
, and S.
Groothuis
, Microelectron. Reliab.
45
, 1079
–1093
(2005
).© 2014 AIP Publishing LLC.
2014
AIP Publishing LLC
You do not currently have access to this content.
