Intracavity quartz-enhanced photoacoustic sensor

We report on a spectroscopic technique named intracavity quartz-enhanced photoacoustic spectroscopy (I-QEPAS) employed for sensitive trace-gas detection in the mid-infrared spectral region. It is based on a combination of QEPAS with a buildup optical cavity. The sensor includes a distributed feedback quantum cascade laser emitting at 4.33 μm. We achieved a laser optical power buildup factor of ∼500, which corresponds to an intracavity laser power of ∼0.75 W. CO₂ has been selected as the target molecule for the I-QEPAS demonstration. We achieved a detection sensitivity of 300 parts per trillion for 4 s integration time, corresponding to a noise equivalent absorption coefficient of 1.4 × 10⁻⁸ cm⁻¹ and a normalized noise-equivalent absorption of 3.2 × 10⁻¹⁰ W cm⁻¹ Hz^−1/2.