We utilize the excellent mechanical properties of epitaxial silicon carbide (SiC) on silicon plus the capability of tuning its residual stress within a large tensile range to fabricate microstrings with fundamental resonant frequencies (f0) of several hundred kHz and mechanical quality factors (Q) of over a million. The fabrication of the perfect-clamped string structures proceeds through simple silicon surface micromachining processes. The resulting f Q product in vacuum is equal or higher as compared to state-of-the-art amorphous silicon nitride microresonators. We demonstrate that as the residual epitaxial SiC stress is doubled, the f Q product for the fundamental mode of the strings shows a four-fold increase.
REFERENCES
1.
G.
Stemme
, J. Micromech. Microeng.
1
(2
), 113
(1991
).2.
K.
Brueckner
, F.
Niebelschuetz
, K.
Tonisch
, C.
Foerster
, V.
Cimalla
, R.
Stephan
, J.
Pezoldt
, T.
Stauden
, O.
Ambacher
, and M. A.
Hein
, Phys. Status Solidi A
208
(2
), 357
(2011
).3.
A.
Boisen
, S.
Dohn
, S. S.
Keller
, S.
Schmid
, and M.
Tenje
, Rep. Prog. Phys.
74
(3
), 036101
(2011
).4.
K. Y.
Yasumura
, T. D.
Stowe
, E. M.
Chow
, T.
Pfafman
, T. W.
Kenny
, B. C.
Stipe
, and D.
Rugar
, J. Microelectromech. Syst.
9
(1
), 117
(2000
).5.
S. S.
Verbridge
, J. M.
Parpia
, R. B.
Reichenbach
, L. M.
Bellan
, and H. G.
Craighead
, J. Appl. Phys.
99
(12
), 124304
(2006
).6.
S. S.
Verbridge
, D. F.
Shapiro
, H. G.
Craighead
, and J. M.
Parpia
, Nano Lett.
7
(6
), 1728
(2007
).7.
S. S.
Verbridge
, H. G.
Craighead
, and J. M.
Parpia
, Appl. Phys. Lett.
92
(1
), 013112
(2008
).8.
S.
Schmid
, K. D.
Jensen
, K. H.
Nielsen
, and A.
Boisen
, Phys. Rev. B
84
(16
), 165307
(2011
).9.
S.
Schmid
, B.
Malm
, and A.
Boisen
, in Proceedings of 24th International Conference on Micro Electro Mechanical Systems MEMS-2011, Cancun, Mexico
(IEEE
, 2011
), pp. 481
–484
.10.
K. L.
Ekinci
and M. L.
Roukes
, Rev. Sci. Instrum.
76
(6
), 061101
(2005
).11.
H. G.
Craighead
, Science
290
(5496
), 1532
(2000
).12.
D. W.
Carr
, S.
Evoy
, L.
Sekaric
, H. G.
Craighead
, and J. M.
Parpia
, Appl. Phys. Lett.
75
(7
), 920
(1999
).13.
C. A.
Zorman
and R. J.
Parro
, “Micro and nanomechanical structures for silicon carbide MEMS and NEMS
,” Phys. Status Solidi B
245
, 1404
–1424
(2008
).14.
F.
Iacopi
, R. E.
Brock
, A.
Iacopi
, L.
Hold
, and R. H.
Dauskardt
, Acta Mater.
61
(17
), 6533
(2013
).15.
X. M. H.
Huang
, C. A.
Zorman
, M.
Mehregany
, and M. L.
Roukes
, Nature
421
(6922
), 496
(2003
).16.
M. B. J.
Wijesundara
and R. G.
Azevedo
, in Silicon Carbide Microsystems for Harsh Environments. MEMS Reference Shelf
, edited by S. D.
Senturia
, R. T.
Howe
, and A. J.
Ricco
(Springer
, New York, USA
, 2011
).17.
L.
Wang
, S.
Dimitrijev
, J.
Han
, A.
Iacopi
, L.
Hold
, P.
Tanner
, and H. B.
Harrison
, Thin Solid Films
519
(19
), 6443
(2011
).18.
F.
Iacopi
, G.
Walker
, L.
Wang
, L.
Malesys
, S.
Ma
, B. V.
Cunning
, and A.
Iacopi
, Appl. Phys. Lett.
102
(1
), 011908
(2013
).19.
A.
Tarraf
, J.
Daleiden
, S.
Irmer
, D.
Prasai
, and H.
Hillmer
, J. Micromech. Microeng.
14
(3
), 317
(2004
).20.
M.
Martyniuk
, C. A.
Musca
, J. M.
Dell
, R. G.
Elliman
, and L.
Faraone
, Int. J. Surf. Sci. Eng.
3
(1/2
), 3
(2009
).21.
E.
Carrera
, G.
Giunta
, and M.
Petrolo
, Beam Structures: Classical and Advanced Theories
(John Wiley and Sons
, United Kingdom
, 2011
), Chap. 2.22.
K. P.
Zetie
, S. F.
Adams
, and R. M.
Tocknell
, Phys. Educ.
35
(1
), 46
(2000
).23.
R.
Lifshitz
and M. L.
Roukes
, Phys. Rev. B
61
(8
), 5600
(2000
).24.
L.
Wang
, S.
Dimitrijev
, J.
Han
, P.
Tanner
, A.
Iacopi
, and L.
Hold
, J. Cryst. Growth
329
, 67
(2011
).25.
26.
L.
Sekaric
, D. W.
Carr
, S.
Evoy
, J. M.
Parpia
, and H. G.
Craighead
, Sens. Actuators, A
101
(1
), 215
(2002
).27.
P. S.
Waggoner
, C. P.
Tan
, and H. G.
Craighead
, J. Appl. Phys.
107
(11
), 114505
(2010
).28.
B.
Gupta
, M.
Notarianni
, N.
Mishra
, M.
Shafiei
, F.
Iacopi
, and N.
Motta
, Carbon
68
, 563
(2014
).29.
S.
Lee
, V. P.
Adiga
, R. A.
Barton
, A. V. D.
Zande
, G. H.
Lee
, B. R.
Ilic
, A.
Gondarenko
, J. M.
Parpia
, H. G.
Craighead
, and J.
Hone
, Nanoletters
13
(9
), 4275
(2013
).30.
R. G.
Azevedo
, D. G.
Jones
, A. V.
Jog
, B.
Jamshidi
, D. R.
Myers
, L.
Chen
, X.-A.
Fu
, M.
Mehregany
, M. B. J.
Wijesundara
, and A. P.
Pisano
, IEEE Sens. J.
7
(3–4
), 568
(2007
).31.
M.
Placidi
, P.
Godignon
, N.
Mestres
, G.
Abadal
, G.
Ferro
, A.
Leycuras
, and T.
Chassagne
, Sens. Actuators, B
133
(1
), 276
(2008
).32.
A.
Oliveros
, A.
Guiseppi-Elie
, and S. E.
Saddow
, Biomed. Microdevices
15
(2
), 353
(2013
).33.
R.
Yakimova
, R. M.
Petoral
, Jr., G. R.
Yazdi
, C.
Vahlberg
, A. L.
Spetz
, and K.
Uvdal
, J. Phys. D: Appl. Phys.
40
, 6435
(2007
).34.
Silicon Carbide Biotechnology: A Biocompatible Semiconductor for Advanced Biomedical Devices and Applications
, edited by S. E.
Saddow
(Elsevier Science
, Amsterdam
, 2011
).© 2014 AIP Publishing LLC.
2014
AIP Publishing LLC
You do not currently have access to this content.