We report an effective method to remove the system-inherent background [Jungk et al., Appl. Phys. Lett. 91, 253511 (2007)] that is present in nominal piezoresponse force microscopy (PFM) setup. Control experiments performed in both ambient and ultrahigh vacuum environments indicate that the system-inherent background probably originates from the interactions between the modulation voltage and surface absorptions. By minimizing such interactions, background-free PFM results were obtained on glass, α-quartz, hexagonal ErMnO3, and periodically poled LiNbO3. The removal of background signal allows quantitative measurements of local intrinsic piezoelectric response with high sensitivity .
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