We demonstrate single photon counting of terahertz (THz) waves transmitted from a local THz point source through a coplanar two-wire waveguide on a GaAs/AlGaAs single heterostructure crystal. In the electrically driven all-in-one chip, quantum Hall edge transport is used to achieve a noiseless injection current for a monochromatic point source of THz fields. The local THz fields are coupled to a coplanar two-wire metal waveguide and transmitted over a macroscopic scale greater than the wavelength (38 μm in GaAs). THz waves propagating on the waveguide are counted as individual photons by a quantum-dot single-electron transistor on the same chip. Photon counting on integrated high-frequency circuits will open the possibilities for on-chip quantum optical experiments.

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