A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.

Topics
Band gap, Phononic crystal, Acoustic waves, Superconducting microresonators, MEMS technology, Wave mechanics, Tensile stress, Radiation losses, Spectrum analyzers, Partition coefficient
© 2014 AIP Publishing LLC.
2014
AIP Publishing LLC
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