A phononic crystal can control the acoustic coupling between a resonator and its support structure. We micromachine a phononic bandgap shield for high Q silicon nitride membranes and study the driven displacement spectra of the membranes and their support structures. We find that inside the observed bandgaps, the density and amplitude of non-membrane modes are greatly suppressed, and membrane modes are shielded from an external mechanical drive by up to 30 dB.
A phononic bandgap shield for high-Q membrane microresonators
P.-L. Yu, K. Cicak, N. S. Kampel, Y. Tsaturyan, T. P. Purdy, R. W. Simmonds, C. A. Regal; A phononic bandgap shield for high-Q membrane microresonators. Appl. Phys. Lett. 13 January 2014; 104 (2): 023510. https://doi.org/10.1063/1.4862031
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