A miniaturized ultrasound sensor is demonstrated in a silicon-on-insulator platform. The sensor is based on a π-phase-shifted Bragg grating formed by waveguide corrugation. Ultrasound detection is performed by monitoring shifts in the resonance frequency of the grating using pulse interferometry. The device is characterized by measuring its response to a wideband acoustic point source generated using the optoacoustic effect. Experimental results show that the sensor's response is dominated by the formation of surface acoustic waves.
REFERENCES
1.
K.
De Vos
, I.
Bartolozzi
, E.
Schacht
, P.
Bienstman
, and R.
Baets
, Opt. Express
15
, 7610
(2007
).2.
K.
De Vos
, J.
Girones
, T.
Claes
, Y.
De Koninck
, S.
Popelka
, E.
Schacht
, R.
Baets
, and P.
Bienstman
, IEEE Photon. J.
1
, 225
(2009
).3.
D. X.
Xu
, A.
Densmore
, A.
Delâge
, P.
Waldron
, R.
McKinnon
, S.
Janz
, J.
Lapointe
, G.
Lopinski
, T.
Mischki
, E.
Post
, P.
Cheben
, and J. H.
Schmid
, Opt. Express
16
, 15137
(2008
).4.
N. A.
Yebo
, P.
Lommens
, Z.
Hens
, and R.
Baets
, Opt. Express
18
, 11859
(2010
).5.
J. T.
Robinson
, L.
Chen
, and M.
Lipson
, Opt. Express
16
, 4296
(2008
).6.
V. M. N.
Passaro
, F.
Dell'Olio
, and F.
De Leonardis
, Sensors
7
, 2741
(2007
).7.
A.
Densmore
, D. X.
Xu
, P.
Waldron
, S.
Janz
, P.
Cheben
, J.
Lapointe
, A.
Delâge
, B.
Lamontagne
, J. H.
Schmid
, and E.
Post
, IEEE Photon. Technol. Lett.
18
, 2520
(2006
).8.
W. E.
Moerner
, Proc. Natl. Acad. Sci. U.S.A.
104
, 12596
(2007
).9.
E.
Hallynck
and P.
Bienstman
, IEEE Photon. J.
4
, 443
(2012
).10.
W. J.
Westerveld
, J.
Pozo
, P. J.
Harmsma
, R.
Schmits
, E.
Tabak
, T. C.
van den Dool
, S. M.
Leinders
, K. W.
van Dongen
, H. P.
Urbach
, and M.
Yousefi
, Opt. Lett.
37
, 479
(2012
).11.
D.
Taillaert
, W.
Van Paepegem
, J.
Vlekken
, and R.
Baets
, Proc. SPIE
6619
, 661914
(2007
).12.
J.
Pozo
, W.
Westerveld
, P. J.
Harmsma
, S.
Yang
, P.
Bodis
, R.
Nieuwland
, M.
Lagioia
, D. M. R. L.
Cascio
, J.
Staats
, R.
Schmits
, H. V. D.
Berg
, E.
Tabak
, K.
Green
, H. P.
Urbach
, L. K.
Cheng
, and M.
Yousefi
, in Transparent Optical Networks (ICTON) 2011: Proceedings of the 13th International Conference, Stockholm, Sweden
, 26–30 June 2011
.13.
G. D.
Kim
, H. S.
Lee
, C. H.
Park
, S. S.
Lee
, B. T.
Lim
, H. K.
Bae
, and W. G.
Lee
, Opt. Express
18
, 22215
(2010
).14.
D.
Gallego
and H.
Lamela
, Opt. Lett.
34
, 1807
(2009
).15.
H.
Grün
, T.
Berer
, P.
Burgholzer
, R.
Nuster
, and G.
Paltauf
, J. Biomed. Opt.
15
, 021307
(2010
).16.
N. E.
Fisher
, D. J.
Webb
, C. N.
Pannell
, D. A.
Jackson
, L. R.
Gavrilov
, J. W.
Hand
, L.
Zhang
, and I.
Bennion
, Appl. Opt.
37
, 8120
(1998
).17.
A.
Rosenthal
, D.
Razansky
, and V.
Ntziachristos
, Opt. Lett.
36
, 1833
(2011
).18.
A.
Rosenthal
, M. A. A.
Caballero
, D.
Razansky
, and V.
Ntziachristos
, Opt. Lett.
37
, 3174
(2012
).19.
V.
Govindan
and S.
Ashkenazi
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
59
, 2304
(2012
).20.
S. W.
Huang
, S. L.
Chen
, T.
Ling
, A.
Maxwell
, M.
O'Donnell
, L. J.
Guo
, and S.
Ashkenazi
, Appl. Phys. Lett.
92
, 193509
(2008
).21.
S. W.
Huang
, T.
Ling
, S.
Ashkenazi
, and L. J.
Guo
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
56
, 2482
(2009
).22.
K. K.
Park
, O.
Oralkan
, and B. T.
Khuri-Yakub
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
60
, 1245
(2013
).23.
M. S.
Nawrocka
, T.
Liu
, X.
Wang
, and R. R.
Panepucci
, Appl. Phys. Lett.
89
, 071110
(2006
).24.
Y.
Painchaud
, M.
Poulin
, C.
Latrasse
, N.
Ayotte
, M. J.
Picard
, and M.
Morin
, in Bragg Gratings, Photosensitivity, and Poling in Glass Waveguides (BGPP) 2012: Proceedings of the 13th International Conference, Colorado Springs, Colorado, USA
, 17–20 June 2011
.25.
B. W.
Snyder
and P. A.
O'Brien
, in Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII, San Francisco, California, USA, 04-05 February 2013
, pp. 86140D.26.
A.
Rosenthal
, V.
Ntziachristos
, and D.
Razansky
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
58
, 316
(2011
).27.
A.
Rosenthal
, D.
Razansky
, and V.
Ntziachristos
, Opt. Express
20
, 19016
(2012
).28.
D.
Royer
and E.
Dieulesaint
, Elastic Waves in Solids I: Free and Guided Propagation
(Springer-Verlag
, Berlin/Heidelberg/New York
, 2000
), Chap. 5.29.
G. M.
Crean
and A.
Waintal
, J. Appl. Cryst.
19
, 181
(1986
).30.
T.
Tachizaki
, T.
Muroya
, O.
Matsuda
, Y.
Sugawara
, D. H.
Hurley
, and O. B.
Wright
, Rev. Sci. Instrum.
77
, 043713
(2006
).31.
Y.
Painchaud
, M.
Poulin
, C.
Latrasse
, and M. J.
Picard
, in Group IV Photonics (GFP) 2012: Proceedings of the 13th International Conference, San Diego, California, USA
, 29–31 August 2012
.32.
M. S.
Nieuwenhuizen
and A. J.
Nederlof
, Sens. Actuators B Chem.
9
, 171
(1992
).33.
S.
Büyükköse
, B.
Vratzov
, D.
Ataç
, J.
van der Veen
, P. V.
Santos
, and W. G.
van der Wiel
, Nanotechnology
23
, 315303
(2012
).34.
R.
Weigel
, D. P.
Morgan
, J. M.
Owens
, A.
Ballato
, K. M.
Lakin
, K.
Hashimoto
, and C. C. W.
Ruppel
, IEEE Trans. Microw. Theory Tech.
50
, 738
(2002
).35.
L. Y.
Yeo
and J. R.
Friend
, Biomicrofluidics
3
, 012002
(2009
).36.
B. T.
Cox
and P. C.
Beard
, IEEE Trans. Ultrason. Ferroelectr. Freq. Control
54
, 394
(2007
).© 2014 AIP Publishing LLC.
2014
AIP Publishing LLC
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