We develop an efficient back gate for silicon-on-insulator (SOI) devices operating at cryogenic temperatures and measure the quadratic hyperfine Stark shift parameter of arsenic donors in isotopically purified 28Si-SOI layers using such structures. The back gate is implemented using MeV ion implantation through the SOI layer forming a metallic electrode in the handle wafer, enabling large and uniform electric fields up to 2 V/μm to be applied across the SOI layer. Utilizing this structure, we measure the Stark shift parameters of arsenic donors embedded in the 28Si-SOI layer and find a contact hyperfine Stark parameter of ηa = −1.9 ± 0.7 × 10−3 μm2/V2. We also demonstrate electric-field driven dopant ionization in the SOI device layer, measured by electron spin resonance.
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12 May 2014
Research Article|
May 12 2014
Stark shift and field ionization of arsenic donors in 28Si-silicon-on-insulator structures
C. C. Lo;
C. C. Lo
a)
1London Centre for Nanotechnology,
University College London
, London WC1H 0AH, United Kingdom
2Department of Electronic and Electrical Engineering,
University College London
, London WC1E 7JE, United Kingdom
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S. Simmons;
S. Simmons
3Department of Materials,
University of Oxford
, Oxford OX1 3PH, United Kingdom
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R. Lo Nardo;
R. Lo Nardo
1London Centre for Nanotechnology,
University College London
, London WC1H 0AH, United Kingdom
3Department of Materials,
University of Oxford
, Oxford OX1 3PH, United Kingdom
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C. D. Weis;
C. D. Weis
4Accelerator and Fusion Research Division,
Lawrence Berkeley National Laboratory
, Berkeley, California 94720, USA
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A. M. Tyryshkin;
A. M. Tyryshkin
5Department of Electrical Engineering,
Princeton University
, Princeton, New Jersey 08544, USA
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J. Meijer;
J. Meijer
b)
6RUBION,
Ruhr-Universitaet Bochum
, Bochum, Germany
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D. Rogalla;
D. Rogalla
6RUBION,
Ruhr-Universitaet Bochum
, Bochum, Germany
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S. A. Lyon;
S. A. Lyon
5Department of Electrical Engineering,
Princeton University
, Princeton, New Jersey 08544, USA
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J. Bokor;
J. Bokor
7Department of Electrical Engineering and Computer Sciences,
University of California
, Berkeley, California 94720, USA
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T. Schenkel;
T. Schenkel
4Accelerator and Fusion Research Division,
Lawrence Berkeley National Laboratory
, Berkeley, California 94720, USA
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J. J. L. Morton
J. J. L. Morton
c)
1London Centre for Nanotechnology,
University College London
, London WC1H 0AH, United Kingdom
2Department of Electronic and Electrical Engineering,
University College London
, London WC1E 7JE, United Kingdom
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a)
Electronic mail: cheuk.lo@ucl.ac.uk.
b)
Present address: Division of Nuclear Solid State Physics, University of Leipzig, Leipzig, Germany.
c)
Electronic mail: jjl.morton@ucl.ac.uk.
Appl. Phys. Lett. 104, 193502 (2014)
Article history
Received:
January 27 2014
Accepted:
May 01 2014
Citation
C. C. Lo, S. Simmons, R. Lo Nardo, C. D. Weis, A. M. Tyryshkin, J. Meijer, D. Rogalla, S. A. Lyon, J. Bokor, T. Schenkel, J. J. L. Morton; Stark shift and field ionization of arsenic donors in 28Si-silicon-on-insulator structures. Appl. Phys. Lett. 12 May 2014; 104 (19): 193502. https://doi.org/10.1063/1.4876175
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