For a better understanding of piezoelectricity in epitaxial film systems, epitaxially grown tetragonal Pb(Zr0.3Ti0.7)0.98Nb0.02O3 (PNZT) thin films with three primary crystallographic orientations were studied with a focus on their piezoelectric behaviors and domain configuration. Using piezoresponse force microscopy, the (001)-oriented epitaxial films were found to show superior piezoelectric properties compared with the (110)- and (111)-oriented films. This can be attributed to the structural characteristics of the tetragonal PNZT phase after applying an electrical field. Island-distributed domain shapes were also mapped for all three orientations.
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