In this paper, we study gas breakdown in micro/nanogaps at atmospheric pressure from low RF to high millimeter band. For gaps larger than about 10 μm, the breakdown voltage agrees with macroscale vacuum experiments, exhibiting a sharp decrease at a critical frequency, due to transition between the boundary- and diffusion-controlled regimes, and a gradual increase at very high frequencies as a result of inefficient energy transfer by field. For sub-micron gaps, a much lower breakdown is obtained almost independent of frequency because of the dominance of field emission.
Frequency response of atmospheric pressure gas breakdown in micro/nanogaps
Abbas Semnani, Ayyaswamy Venkattraman, Alina A. Alexeenko, Dimitrios Peroulis; Frequency response of atmospheric pressure gas breakdown in micro/nanogaps. Appl. Phys. Lett. 5 August 2013; 103 (6): 063102. https://doi.org/10.1063/1.4817978
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