We explore mechanical properties of top down fabricated, singly clamped inverted conical GaAs nanowires. Combining nanowire lengths of 2–9 μm with foot diameters of 36–935 nm yields fundamental flexural eigenmodes spanning two orders of magnitude from 200 kHz to 42 MHz. We extract a size-independent value of Young's modulus of (45 ± 3) GPa. With foot diameters down to a few tens of nanometers, the investigated nanowires are promising candidates for ultra-flexible and ultra-sensitive nanomechanical devices.
REFERENCES
1.
J.
Chaste
, A.
Eichler
, J.
Moser
, G.
Ceballos
, R.
Rurali
, and A.
Bachtold
, Nat. Nanotechnol.
7
, 301
(2012
).2.
M. S.
Hanay
, S.
Kelber
, A. K.
Naik
, D.
Chi
, S.
Hentz
, E. C.
Bullard
, E.
Colinet
, L.
Duraffourg
, and M. L.
Roukes
, Nat. Nanotechnol.
7
, 602
(2012
).3.
H. J.
Mamin
and D.
Rugar
, Appl. Phys. Lett.
79
, 3358
(2001
).4.
J.
Arlett
, J.
Maloney
, B.
Gudlewski
, M.
Muluneh
, and M.
Roukes
, Nano Lett.
6
, 1000
(2006
).5.
W.
Hallstrom
, M.
Lexholm
, D. B.
Suyatin
, G.
Hammarin
, D.
Hessman
, L.
Samuelson
, L.
Montelius
, M.
Kanje
, and C. N.
Prinz
, Nano Lett.
10
, 782
(2010
).6.
T. P.
Burg
, M.
Godin
, S. M.
Knudsen
, W.
Shen
, G.
Carlson
, J. S.
Foster
, K.
Babcock
, and S. R.
Manalis
, Nature
446
, 1066
(2007
).7.
P. S.
Waggoner
and H. G.
Craighead
, Lab Chip
7
, 1238
(2007
).8.
J.
Arlett
, E.
Myers
, and M.
Roukes
, Nat. Nanotechnol.
6
, 203
(2011
).9.
A. G.
Krause
, M.
Winger
, T. D.
Blasius
, Q.
Lin
, and O.
Painter
, Nat. Photonics
6
, 768
(2012
).10.
X. L.
Feng
, C. J.
White
, A.
Hajimiri
, and M. L.
Roukes
, Nat. Nanotechnol.
3
, 342
(2008
).11.
M. M. J.
Treacy
, T. W.
Ebbesen
, and J. M.
Gibson
, Nature
381
, 678
(1996
).12.
X.
Li
, T.
Ono
, Y.
Wang
, and M.
Esashi
, Appl. Phys. Lett.
83
, 3081
(2003
).13.
C. Q.
Chen
, Y.
Shi
, Y. S.
Zhang
, J.
Zhu
, and Y. J.
Yan
, Phys. Rev. Lett.
96
, 075505
(2006
).14.
K. B.
Gavan
, H. J. R.
Westra
, E. W. J. M.
van der Drift
, W. J.
Venstra
, and H. S. J.
van der Zant
, Appl. Phys. Lett.
94
, 233108
(2009
).15.
M.
Lexholm
, I.
Karlsson
, F.
Boxberg
, and D.
Hessman
, Appl. Phys. Lett.
95
, 113103
(2009
).16.
Q.
Qin
, F.
Xu
, Y.
Cao
, P. I.
Ro
, and Y.
Zhu
, Small
8
, 2571
(2012
).17.
W.
Weaver
, S. P.
Timoshenko
, and D. H.
Young
, Vibration Problems in Engineering
, 5th ed. (John Wiley and Sons
, 1990
).18.
S.
Rast
, C.
Wattinger
, U.
Gysin
, and E.
Meyer
, Nanotechnology
11
, 169
(2000
).19.
D.-W.
Lee
, J.-H.
Kang
, U.
Gysin
, S.
Rast
, E.
Meyer
, M.
Despont
, and C.
Gerber
, J. Micromech. Microeng.
15
, 2179
(2005
).20.
I.
Favero
, S.
Stapfner
, D.
Hunger
, P.
Paulitschke
, J.
Reichel
, H.
Lorenz
, E. M.
Weig
, and K.
Karrai
, Opt. Express
17
, 12813
(2009
).21.
B.
Sanii
and P. D.
Ashby
, Phys. Rev. Lett.
104
, 147203
(2010
).22.
P.
Paulitschke
, P.
Loch
, H.
Lorenz
, and E. M.
Weig
, “Top-view displacement detection of singly clamped nanowire resonators
” (unpublished).23.
G. R.
Kirchhoff
, Monatsberichte der Königlich Preussischen Akademie der Wissenschaften zu Berlin, 1879
, p. 815
.24.
25.
H. D.
Conway
and J. F.
Dubil
, J. Appl. Mech.
32
, 932
(1965
).26.
See supplementary material at http://dx.doi.org/10.1063/1.4851897 for details on the analytical solution of the boundary value problem of the inverted conical nanowire under piezo-actuation, as well as the evaluation of its eigenfrequency as a function of the geometry factor G.
27.
T. B.
Bateman
, H. J.
McSkimin
, and J. M.
Whelan
, J. Appl. Phys.
30
, 544
(1959
).28.
M. A.
Hopcroft
, W. D.
Nix
, and T. W.
Kenny
, J. Microelectromech. Syst.
19
, 229
(2010
).29.
Y. A.
Burenkov
, Y. M.
Burdukov
, S. Y.
Davidov
, and S. P.
Nikanorov
, Sov. Phys. Solid State
15
, 1175
(1973
).30.
Y.-B.
Wang
, L.-F.
Wang
, H. J.
Joyce
, Q.
Gao
, X.-Z.
Liao
, Y.-W.
Mai
, H. H.
Tan
, J.
Zou
, S. P.
Ringer
, H.-J.
Gao
, and C.
Jagadish
, Adv. Mater.
23
, 1356
(2011
).31.
C.
Kallesoe
, M. B.
Larsen
, P.
Boggild
, and K.
Molhave
, Rev. Sci. Instrum.
83
, 023704
(2012
).32.
P. A.
Alekseev
, M. S.
Dunaevskii
, A. V.
Stovpyaga
, M.
Lepsad
, and A. N.
Titkova
, Semiconductors
46
, 641
(2012
).33.
C.-Y.
Nam
, P.
Jaroenapibal
, D.
Tham
, D. E.
Luzzi
, S.
Evoy
, and J. E.
Fischer
, Nano Lett.
6
, 153
(2006
).34.
L. T.
Ngo
, D.
Almécija
, J. E.
Sader
, B.
Daly
, N.
Petkov
, J. D.
Holmes
, D.
Erts
, and J. J.
Boland
, Nano Lett.
6
, 2964
(2006
).35.
H.
Zhang
, J.
Tang
, L.
Zhang
, B.
An
, and L.-C.
Qin
, Appl. Phys. Lett.
92
, 173121
(2008
).36.
M.
Löffler
, U.
Weissker
, T.
Mühl
, T.
Gemming
, and B.
Büchner
, Ultramicroscopy
111
, 155
(2011
).37.
M.
Melli
, A.
Pozzato
, and M.
Lazzarino
, Microelectron. Eng.
87
, 730
(2010
).38.
M.
Spletzer
, A.
Raman
, H.
Sumali
, and J. P.
Sullivan
, Appl. Phys. Lett.
92
, 114102
(2008
).39.
E.
Buks
and M. L.
Roukes
, J. Microelectromech. Syst.
11
, 802
(2002
).40.
R.
Lifshitz
, E.
Kenig
, and M. C.
Cross
, “Fluctuating nonlinear oscillators
,” Collective Dynamics in Arrays of Coupled Nonlinear Resonators
(Oxford University Press
, Oxford
, 2012
), Chap. 11.41.
42.
Y.
Lin
, L.
Hung
, S.
Li
, Z.
Ren
, and C.
Nguyen
, in Digest of Technical Papers of the 14th International Conference on Solid-State Sensors and Actuators and Microsystems (TRANSDUCERS 2007)
, 2007
, p. 2453
.43.
M.
Bora
, B. J.
Fasenfest
, E. M.
Behymer
, A. S.-P.
Chang
, H. T.
Nguyen
, J. A.
Britten
, C. C.
Larson
, J. W.
Chan
, R. R.
Miles
, and T. C.
Bond
, Nano Lett.
10
, 2832
(2010
).44.
J.
Wiersig
, S.
Flach
, and K.-H.
Ahn
, Appl. Phys. Lett.
93
, 222110
(2008
).45.
L. J.
Lauhon
, M. S.
Gudiksen
, and C. M.
Lieber
, Philos. Trans. R. Soc. London, Ser. A
362
, 1247
(2004
).46.
C.
Schneider
, T.
Heindel
, A.
Huggenberger
, T. A.
Niederstrasser
, S.
Reitzenstein
, A.
Forchel
, S.
Hofling
, and M.
Kamp
, Appl. Phys. Lett.
100
, 091108
(2012
).47.
G.
Heinrich
, M.
Ludwig
, J.
Qian
, B.
Kubala
, and F.
Marquardt
, Phys. Rev. Lett.
107
, 043603
(2011
).48.
A.
Xuereb
, C.
Genes
, and A.
Dantan
, Phys. Rev. Lett.
109
, 223601
(2012
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
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