Several applications of external microbeam techniques demand a very accurate and controlled dose delivery. To satisfy these requirements when post-sample ion detection is not feasible, we constructed a transmission single-ion detector based on an ultra-thin diamond membrane. The negligible intrinsic noise provides an excellent signal-to-noise ratio and enables a hit-detection efficiency of close to 100%, even for energetic protons, while the small thickness of the membrane limits beam spreading. Moreover, because of the superb mechanical stiffness of diamond, this membrane can simultaneously serve as a vacuum window and allow the extraction of an ion microbeam into the atmosphere.

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