In this Letter, we report on the experimental development and computational modeling of a simple, one-step method for the fabrication of diverse 2D and 3D periodic nanostructures derived from gold films on silicon substrates and over areas spanning 1 cm2. These nanostructures can be patterned on films of thickness ranging from 50 nm to 500 nm with pulsed interfering laser beams. A finite volume-based inhomogeneous multiphase model of the process shows reasonable agreement with the experimentally obtained topographies and provides insights on the flow physics including normal and radial expansion that results in peeling of film from the substrate.
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