The inverse spin Hall effect (ISHE) induced by spin pumping in indium tin oxide (ITO) films has been investigated quantitatively. We measured ferromagnetic resonance and electromotive force spectra with changing the ITO thickness in ITO/permalloy bilayer films. The intensity of the observed electromotive force changes systematically with the ITO film thickness, which is consistent with the prediction of ISHE. By using an equivalent circuit model, the spin Hall angle and diffusion length of the ITO film are estimated.
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