Ion energy distribution functions measured for high power impulse magnetron sputtering show features, such as a broad peak at several 10 eV with an extended tail, as well as asymmetry with respect to , where and are the local electric and magnetic field vectors, respectively. Here it is proposed that those features are due to the formation of a potential hump of several 10 V in each of the traveling ionization zones. Potential hump formation is associated with a negative-positive-negative space charge that naturally forms in ionization zones driven by energetic drifting electrons.
REFERENCES
1.
A.
Hecimovic
and A. P.
Ehiasarian
, J. Appl. Phys.
108
, 063301
(2010
).2.
J. T.
Gudmundsson
, N.
Brenning
, D.
Lundin
, and U.
Helmersson
, J. Vac. Sci. Technol. A
30
, 030801
(2012
).3.
D.
Lundin
, P.
Larsson
, E.
Wallin
, M.
Lattemann
, N.
Brenning
, and U.
Helmersson
, Plasma Sources Sci. Technol.
17
, 035021
(2008
).4.
P.
Sigmund
, Phys. Rev.
184
, 383
(1969
).5.
M. W.
Thompson
, Philos. Mag.
18
, 377
(1968
).6.
J.
Vlček
, P.
Kudláček
, K.
Burcalová
, and J.
Musil
, Europhys. Lett.
77
, 45002
(2007
).7.
V. V.
Serikov
and K.
Nanbu
, J. Appl. Phys.
82
, 5948
(1997
).8.
J. W.
Bradley
, S.
Thompson
, and Y. A.
Gonzalvo
, Plasma Sources Sci. Technol.
10
, 490
(2001
).9.
A.
Rauch
, R.
Mendelsberg
, J. M.
Sanders
, and A.
Anders
, J. Appl. Phys.
111
, 083302
(2012
).10.
P.
Poolcharuansin
, B.
Liebig
, and J. W.
Bradley
, Plasma Sources Sci. Technol.
21
, 015001
(2012
).11.
M.
Panjan
, R.
Franz
, and A.
Anders
, “Asymmetric particle fluxes from ionization zones in sputtering magnetrons,” Plasma Sources Sci. Technol.
(unpublished).12.
A.
Mishra
, P. J.
Kelly
, and J. W.
Bradley
, J. Phys. D: Appl. Phys.
44
, 425201
(2011
).13.
A.
Kozyrev
, N.
Sochugov
, K.
Oskomov
, A.
Zakharov
, and A.
Odivanova
, Plasma Phys. Rep.
37
, 621
(2011
).14.
A.
Anders
, P.
Ni
, and A.
Rauch
, J. Appl. Phys.
111
, 053304
(2012
).15.
A. P.
Ehiasarian
, A.
Hecimovic
, T.
de los Arcos
, R.
New
, V.
Schulz-von der Gathen
, M.
Böke
, and J.
Winter
, Appl. Phys. Lett.
100
, 114101
(2012
).16.
P. A.
Ni
, C.
Hornschuch
, M.
Panjan
, and A.
Anders
, Appl. Phys. Lett.
101
, 224102
(2012
).17.
A.
Anders
, Appl. Phys. Lett.
100
, 224104
(2012
).18.
N.
Brenning
, D.
Lundin
, T.
Minea
, C.
Costin
, and C.
Vitelaru
, J. Phys. D: Appl. Phys.
46
, 084005
(2013
).19.
C.
Charles
, Plasma Sources Sci. Technol.
16
, R1
(2007
).20.
A.
Piel
, E.
Möbius
, and G.
Himmel
, Astrophys. Space Sci.
72
, 211
(1980
).21.
J.
Andersson
, P.
Ni
, and A.
Anders
, Appl. Phys. Lett.
103
, 054104
(2013
).22.
A.
Anders
, Surf. Coat. Technol.
183
, 301
(2004
).23.
S.
Gallian
, W. N. G.
Hitchon
, D.
Eremin
, T.
Mussenbrock
, and R. P.
Brinkmann
, Plasma Sources Sci. Technol.
22
, 055012
(2013
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
You do not currently have access to this content.
