Fabrication of nanopores in 1 nm thick carbon nanomembranes with slow highly charged ions

We describe the use of slow highly charged ions as a simple tool for the fabrication of nanopores with well-defined diameters typically between 10 and 20 nm in freestanding, 1 nm thick carbon nanomembranes (CNMs). When CNMs are exposed to a flux of highly charged ions, for example Xe⁴⁰⁺, each individual ion creates a circular nanopore, the size of which depends on the kinetic and potential energy of the impinging ion. The controlled fabrication of nanopores with a uniform size opens a path for the application of CNM based filters in nanobiotechnology.