Highly (001)-oriented thin continuous L1 FePt film by introducing an FeO_x cap layer

We demonstrate a thin and continuous L1₀ FePt film with a well-aligned (001) texture directly grown on Si || SiO₂ substrates by introducing an FeO_x cap layer. The agglomeration of capped FePt films is greatly suppressed by inhibiting the surface diffusion. This, in turn, yields a continuous and smooth film, which significantly promotes the (001) out-of-plane orientation and perpendicular anisotropy. The reduction of Fe oxides occurs during annealing, which not only promotes interdiffusion of Fe and Pt for L1₀ ordering but also removes the cap layer simultaneously. Therefore, additional etching for the cap layer is not required for further fabricating bit patterned media.