Copper nanoparticles (NPs) were synthesized using a high power pulsed hollow cathode technique and the produced NPs were studied as a function of pulse parameters, i.e., frequency, peak current, and pulse width. It was found that the particle size can be altered in a range from 10 to 40 nm by changing any one of the pulse parameters. The mechanisms of NP synthesis with respect to a pulsed discharge and a high degree of ionization of the sputtered material are discussed.

1.
B. R.
Cuenya
,
Thin Solid Films
518
,
3127
(
2010
).
2.
3.
S.
Linic
,
P.
Christopher
, and
D. B.
Ingram
,
Nat. Mater.
10
,
911
(
2011
).
4.
E. A.
Coronado
,
E. R.
Encina
, and
F. D.
Stefani
,
Nanoscale
3
,
4042
(
2011
).
5.
H.
Hahn
and
R. S.
Averback
,
J. Appl. Phys.
67
,
1113
(
1990
).
6.
H.
Haberland
,
M.
Karrais
,
M.
Mall
, and
Y.
Thurner
,
J. Vac. Sci. Technol. A
10
,
3266
(
1992
).
7.
K.
Ishii
,
J. Vac. Sci. Technol. A
7
,
256
(
1989
).
8.
A.
Piel
,
Plasma Physics: An Introduction to Laboratory, Space, and Fusion Plasmas
, 1st ed. (
Springer
,
2010
), Chap. 10.
9.
M. A.
Lieberman
and
A. J.
Lichtenberg
,
Principles of Plasma Discharges and Materials Processing
, 2nd ed. (
John Wiley & Sons
,
Hoboken, New Jersey
,
2005
), Chap. 17.4, pp.
662
668
10.
M.
Gracia-Pinilla
,
E.
Martínez
,
G. S.
Vidaurri
, and
E.
Pérez-Tijerina
,
Nanoscale Res. Lett.
5
,
180
(
2009
).
11.
H.
Sakuma
,
H.
Aoshima
, and
K.
Ishii
,
J. Magn.
11
,
103
(
2006
).
12.
A. I.
Ayesh
,
N.
Qamhieh
,
H.
Ghamlouche
,
S.
Thaker
, and
M.
El-Shaer
,
J. Appl. Phys.
107
,
034317
(
2010
).
13.
J. T.
Gudmundsson
,
N.
Brenning
,
D.
Lundin
, and
U.
Helmersson
,
J. Vac. Sci. Technol. A
30
,
030801
(
2012
).
14.
J.
Bohlmark
,
J.
Alami
,
C.
Christou
,
A.
Ehiasarian
, and
U.
Helmersson
,
J. Vac. Sci. Technol. A
23
,
18
(
2005
).
15.
V.
Stranák
,
S.
Block
,
S.
Drache
,
Z.
Hubicka
,
C. A.
Helm
,
L.
Jastrabík
,
M.
Tichý
, and
R.
Hippler
,
Surf. Coat. Technol.
205
,
2755
(
2011
).
16.
R.
Werner
,
T.
Höche
, and
S. G.
Mayr
,
Cryst. Eng. Comm.
13
,
3046
(
2011
).
17.
I.
Matsui
,
J. Nanopart. Res.
8
,
429
(
2006
).
18.
C.
Cui
and
J.
Goree
,
IEEE Trans. Plasma Sci.
22
,
151
(
1994
).
19.
H. M.
Mott-Smith
and
I.
Langmuir
,
Phys. Rev.
28
,
727
(
1926
).
20.
I. H.
Hutchinson
,
Plasma Phys. Controlled Fusion
47
,
71
(
2005
).
21.
M. S.
Barnes
,
J. H.
Keller
,
J. C.
Forster
,
J. A.
O'Neill
, and
D. K.
Coultas
,
Phys. Rev. Lett.
68
,
313
(
1992
).
22.
C. G.
Granqvist
and
R. A.
Buhrman
,
J. Appl. Phys.
47
,
2200
(
1976
).
23.
T.
Hihara
and
K.
Sumiyama
,
J. Appl. Phys.
84
,
5270
(
1998
).
24.
V. I.
Kolobov
and
L. D.
Tsendin
,
Plasma Sources Sci. Technol.
4
,
551
(
1995
).
25.
V.
Kouznetsov
,
K.
Macák
,
J. M.
Schneider
,
U.
Helmersson
, and
I.
Petrov
,
Surf. Coat. Technol.
122
,
290
(
1999
).
26.
M.
Hasan
, “
Modeling the extraction of sputtered species out of a pulsed hollow cathode
,” Master's thesis, XR-EE-SPP 2011:001 (
Royal Institute of Technology
, Sweden,
2011
).
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