We compare the extreme ultraviolet emission characteristics of tin and galinstan (atomic %: Ga: 78.35, In: 14.93, Sn: 6.72) between 10 nm and 18 nm in a laser-triggered discharge between liquid metal-coated electrodes. Over this wavelength range, the energy conversion efficiency for galinstan is approximately half that of tin, but the spectrum is less strongly peaked in the 13–15 nm region. The extreme ultraviolet source dimensions were 110 ± 25 μm diameter and 500 ± 125 μm length. The flatter spectrum, and −19 °C melting point, makes this galinstan discharge a relatively simple high radiance extreme ultraviolet light source for metrology and scientific applications.
REFERENCES
1.
2.
G.
O’Sullivan
and R.
Faulkner
, Opt. Eng.
33
(12
), 3978
(1994
).3.
G.
Schriever
, O.
Semprez
, J.
Jonkers
, M.
Yoshioka
, and R.
Apetz
, J. Micro/Nanolith. MEMS MOEMS
11
(2
), 021104
(2012
).4.
K.
Gielissen
, Y.
Sidelnikov
, D.
Glushkov
, W. A.
Soer
, V.
Banine
, and J. J. A. M. V. D.
Mullen
, J. Appl. Phys.
107
, 013301
(2010
).5.
V. Y.
Banine
, K. N.
Koshelev
, and G. H. P. M.
Swinkels
, J. Phys. D
44
, 253001
(2011
).6.
K.
Fahy
, F.
O’Reilly
, E.
Scally
, and P.
Sheridan
, Proc. SPIE
7802
, 78020
K (2010
).7.
M. C.
Schuermann
, T.
Missalla
, K. R.
Mann
, S.
Kranzusch
, R. M.
Klein
, F.
Scholze
, G.
Ulm
, R.
Lebert
, and L.
Juschkin
, Proc. SPIE
5037
, 378
(2003
).8.
T.
Missalla
, M. C.
Schuermann
, R.
Lebert
, C.
Wies
, L.
Juschkin
, Roman M.
Klein
, F.
Scholze
, G.
Ulm
, A.
Egbert
, B.
Tkachenko
, and B. N.
Chichkov
, Proc. SPIE
5374
, 979
(2004
).9.
L. A.
Shmaenok
, in International SEMATECH EUV Source Workshop Meeting, February 2004
.10.
P.
Dunne
, O.
Morris
, E.
Sokell
, F.
O’Reilly
, G.
O’Sullivan
, N.
Murphy
, P.
Hayden
, and V.
Bakshi
, SEMATECH Document ID No. 06114813A-ENG (2006
).11.
M.
Yoshioka
, Y.
Teramoto
, J.
Jonkers
, M. C.
Schürmann
, R.
Apetz
, V.
Kilian
, and M.
Corthout
, Proc. SPIE
7969
, 79691
G (2011
).12.
P.
Hayden
, A.
Cummings
, N.
Murphy
, G.
O’Sullivan
, P.
Sheridan
, J.
White
, and P.
Dunne
, J. Appl. Phys.
99
, 093302
(2006
).13.
J.
White
, P.
Dunne
, P.
Hayden
, F.
O’Reilly
, and G.
O’Sullivan
, Appl. Phys. Lett.
90
, 181502
(2007
).14.
R. D.
Cowan
, Theory of Atomic Structure and Spectra
(University of California Press
, Berkeley, CA
, 1981
).15.
I.
Kambali
, private communication (2012
).16.
R. W.
Coons
, S. S.
Harilal
, D.
Campos
, and A.
Hassanein
, J. Appl. Phys.
108
, 063306
(2010
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
You do not currently have access to this content.
