A miniature Michelson interferometer is analyzed theoretically and experimentally. The fabricated micro-interferometer is incorporated at the tip of a monolithic silicon probe to achieve contactless distance measurements and surface profilometry. For infrared operation, two approaches are studied, based on the use of monochromatic light and wavelength sweep, respectively. A theoretical model is devised to depict the system characteristics taking into account Gaussian beam divergence and light spot size. Furthermore, preliminary results using visible light demonstrate operation of the probe as a visible light spectrometer, despite silicon absorbance, thanks to the micrometer thickness involved in the beam splitter.
REFERENCES
1.
A. A.
Michelson
, Astrophys. J.
51
, 257
(1920
).2.
R.
Loudon
, Phys. Rev. Lett.
47
, 815
(1981
).3.
K.
McKenzie
, D. A.
Shaddock
, and D. E.
McClelland
, Phys. Rev. Lett.
88
, 231102
(2002
).4.
P. R.
Griffiths
, Science
222
, 297
(1983
).5.
F.
Garczarek
and K.
Gerwert
, Nature
439
, 109
(2006
).6.
W.
Jung
, D. T.
McCormick
, J.
Zhang
, L.
Wang
, N. C.
Tien
, and Z. P.
Chen
, Appl. Phys. Lett.
88
, 163901
(2006
).7.
R. K.
Wang
, Appl. Phys. Lett.
90
, 054103
(2007
).8.
S. W.
Lee
, H. W.
Song
, M. Y.
Jung
, and S. H.
Kim
, Opt. Express
19
, 21227
(2011
).9.
Y.
Ferrec
, J.
Taboury
, H.
Sauer
, P.
Chavel
, P.
Fournet
, C.
Coudrain
, J.
Deschamps
, and J.
Primot
, Appl. Opt.
50
, 5894
(2011
).10.
H. P.
Layer
, IEEE Trans. Instrum. Meas.
29
, 358
(1980
).11.
H. G.
Tompkins
and W. A.
McGahan
, Spectroscopic Ellipsometry and Reflectometry
(John Wiley & Sons
, New York
, 1999
).12.
E.
Fischer
, E.
Dalhoff
, S.
Heim
, U.
Hofbauer
, and H. J.
Tiziani
, Appl. Opt.
34
, 5589
(1995
).13.
G.
Molesini
, G.
Pedrini
, P.
Poggi
, and F.
Quericioli
, Opt. Commun.
49
, 229
(1984
).14.
15.
M.
Malak
, A.-F.
Obaton
, F.
Marty
, N.
Pavy
, S.
Didelon
, P.
Basset
, and T.
Bourouina
, AIP Adv.
2
, 022143
(2012
).16.
B.
Saadany
, M.
Malak
, M.
Kubota
, F.
Marty
, Y.
Mita
, D.
Khalil
, and T.
Bourouina
, IEEE J. Sel. Top. Quantum Electron.
12
, 1480
(2006
).17.
M.
Malak
, N.
Pavy
, F.
Marty
, Y.-A.
Peter
, A. Q.
Liu
, and T.
Bourouina
, Appl. Phys. Lett.
98
, 211113
(2011
).18.
F.
Marty
, L.
Rousseau
, B.
Saadany
, B.
Mercier
, O.
Français
, Y.
Mita
, and T.
Bourouina
, Microelectron. J.
36
, 673
(2005
).19.
M.
Malak
, F.
Marty
, N.
Pavy
, Y.-A.
Peter
, A-Q.
Liu
, and T.
Bourouina
, J. Microelectromech. Syst.
21
, 171
(2012
).20.
O.
Manzardo
, H.-P.
Herzig
, C. R.
Marxer
, and N. F.
de Rooij
, Opt. Lett.
24
, 1705
(1999
).21.
B.
Saadany
, T.
Bourouina
, M.
Malak
, M.
Kubota
, Y.
Mita
, and D.
Khalil
, in Proceedings of the IEEE/LEOS International Conference on Optical MEMS and Their Applications, Montana, USA, 20-24 August
(2006
), pp. 50
–51
.22.
B. E. A.
Saleh
and M. C.
Teich
, Fundamentals of Photonics
(John Wiley & Sons
, New York
, 1991
).23.
S.
Adachi
, Phys. Rev. B
38
, 12966
(1988
).24.
M.
Born
and E.
Wolf
, Principles of Optics
(Cambridge University Press
, Cambridge
, 1999
).25.
H. A.
Macleod
, Thin Film Optical Filters
(Institute of Physics Publishing
, Bristol
, 2001
).© 2013 AIP Publishing LLC.
2013
AIP Publishing LLC
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