We present the design of an optomechanical crystal nanobeam cavity that combines finite-element simulation with numerical optimization, and considers the optomechanical coupling arising from both moving dielectric boundaries and the photo-elastic effect. Applying this methodology results in a nanobeam with an experimentally realized intrinsic optical Q-factor of 1.2×106, a mechanical frequency of 5.1 GHz, a mechanical Q-factor of 6.8×105 (at T = 10 K), and a zero-point-motion optomechanical coupling rate of g = 1.1 MHz.

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