We present the design of an optomechanical crystal nanobeam cavity that combines finite-element simulation with numerical optimization, and considers the optomechanical coupling arising from both moving dielectric boundaries and the photo-elastic effect. Applying this methodology results in a nanobeam with an experimentally realized intrinsic optical Q-factor of , a mechanical frequency of 5.1 GHz, a mechanical Q-factor of (at T = 10 K), and a zero-point-motion optomechanical coupling rate of g = 1.1 MHz.
Optimized optomechanical crystal cavity with acoustic radiation shield
Jasper Chan, Amir H. Safavi-Naeini, Jeff T. Hill, Seán Meenehan, Oskar Painter; Optimized optomechanical crystal cavity with acoustic radiation shield. Appl. Phys. Lett. 20 August 2012; 101 (8): 081115. https://doi.org/10.1063/1.4747726
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