High quality graphene-metal contacts are desirable for high-performance graphene based electronics. Process related factors result large variation in the contact resistance. A post-processing method is needed to improve graphene-metal contacts. In this letter, we studied rapid thermal annealing (RTA) of graphene-metal contacts. We present results of a systematic investigation of device scaling before and after RTA for various metals. The results reveal that RTA provides a convenient technique to reduce contact resistance, thus to obtain reproducible device operation.
Skip Nav Destination
Research Article| December 10 2012
Rapid thermal annealing of graphene-metal contact
Osman Balci, Coskun Kocabas; Rapid thermal annealing of graphene-metal contact. Appl. Phys. Lett. 10 December 2012; 101 (24): 243105. https://doi.org/10.1063/1.4769817
Download citation file: