An ultrathin Si layer (≤1 nm) deposited on Co magnetic films was bombarded with energetic C+ ions to form a Co/Si/C mixed layer. This layer improved the tribological properties of the Co film as compared with those of a commercial hard disk media with 3.0 nm carbon overcoat and 1.4 nm of lubricant. Formation of a network of C-C and Si-C bonds at the outermost layer and the bulk of the Si/C film as well as formation of chemical bonds between the Co surface and the mixed layer was found as the main factors to improve the tribological properties.
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