Crossed structure of a microfluidic channel and an optical channel waveguide is simple and promising to realize detection of weak fluorescence on an integrated device. Usage of TiO2 waveguides is suitable for the device because of the high numerical aperture. In this study, we developed fabrication processes for the TiO2 channel waveguides traversed by microfluidic channels of 0.5–6 μm widths and investigated the effect of the microfluidic channel to the transmittances. The results elucidated that the photointensity at the microfluidic channel was enough to excite fluorophores. Furthermore, we demonstrated detection of fluorescence from 350 quantum dots.
Embedded TiO2 waveguides for sensing nanofluorophores in a microfluidic channel
Masayuki Furuhashi, Masazumi Fujiwara, Takahito Ohshiro, Kazuki Matsubara, Makusu Tsutsui, Masateru Taniguchi, Shigeki Takeuchi, Tomoji Kawai; Embedded TiO2 waveguides for sensing nanofluorophores in a microfluidic channel. Appl. Phys. Lett. 8 October 2012; 101 (15): 153115. https://doi.org/10.1063/1.4757759
Download citation file: