This work investigates resonances in a capacitively coupled, low pressure krypton microdischarge operated at 2.5 GHz. A circuit model for the device, which has a length dimension of approximately 1 mm, calculates impedance values for a range of electron densities. The model results predict several “parallel” and “series” resonances at the driving frequency when the electron density is approximately 8 × 1011 cm−3 and 5 × 1012 cm−3. The series resonance occurs when the resistance approaches the output impedance of the radio-frequency signal source, minimizing the reflected power. These resonances explain an experimentally observed jump in intensity with increasing input power.
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2012
American Institute of Physics
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