We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane.

Topics
Electrical properties and parameters, Electronic noise, Dielectric materials, Dielectric properties, Tensile stress, Optical resonators, Optomechanics, Spectrum analyzers, Laser physics, Chemical elements
© 2012 American Institute of Physics.
2012
American Institute of Physics
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