We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane.
Skip Nav Destination
Research Article| February 10 2012
Mechanically compliant grating reflectors for optomechanics
Utku Kemiktarak, Michael Metcalfe, Mathieu Durand, John Lawall; Mechanically compliant grating reflectors for optomechanics. Appl. Phys. Lett. 6 February 2012; 100 (6): 061124. https://doi.org/10.1063/1.3684248
Download citation file: