We demonstrate micromechanical reflectors with a reflectivity as large as 99.4% and a mechanical quality factor Q as large as 7.8 × 105 for optomechanical applications. The reflectors are silicon nitride membranes patterned with sub-wavelength grating structures, obviating the need for the many dielectric layers used in conventional mirrors. We have employed the reflectors in the construction of a Fabry-Perot cavity with a finesse as high as F = 1200, and used the optical response to probe the mechanical properties of the membrane.

1.
I.
Tittonen
,
G.
Breitenbach
,
T.
Kalkbrenner
,
T.
Müller
,
R.
Conradt
,
S.
Schiller
,
E.
Steinsland
,
N.
Blanc
, and
N. F.
de Rooij
,
Phys. Rev. A
59
,
1038
(
1999
).
2.
S.
Bose
,
K.
Jacobs
, and
P. L.
Knight
,
Phys. Rev. A
56
,
4175
(
1997
).
3.
W.
Marshall
,
C.
Simon
,
R.
Penrose
, and
D.
Bouwmeester
,
Phys. Rev. Lett.
91
,
130401
(
2003
).
4.
O.
Arcizet
,
P.
Cohadon
,
T.
Briant
,
M.
Pinard
,
A.
Heidmann
,
J.
Mackowski
,
C.
Michel
,
L.
Pinard
,
O.
Franais
, and
L.
Rousseau
,
Phys. Rev. Lett.
97
,
133601
(
2006
).
5.
J. D.
Thompson
,
B. M.
Zwickl
,
A. M.
Jayich
,
F.
Marquardt
,
S. M.
Girvin
, and
J. G. E.
Harris
,
Nature
452
,
72
(
2008
).
6.
D.
Wilson
,
C.
Regal
,
S.
Papp
, and
H.
Kimble
,
Phys. Rev. Lett.
103
,
207204
(
2009
).
7.
S.
Gröblacher
,
J. B.
Hertzberg
,
M. R.
Vanner
,
G. D.
Cole
,
S.
Gigan
,
K. C.
Schwab
, and
M.
Aspelmeyer
,
Nat. Phys.
5
,
485
(
2009
).
8.
T. J.
Kippenberg
and
K. J.
Vahala
,
Opt. Express
15
,
17172
(
2007
).
9.
D.
Kleckner
,
W. T. M.
Irvine
,
S. S. R.
Oemrawsingh
, and
D.
Bouwmeester
,
Phys. Rev. A
81
,
043814
(
2010
).
10.
H. R.
Böhm
,
S.
Gigan
,
F.
Blaser
,
A.
Zeilinger
,
M.
Aspelmeyer
,
G.
Langer
,
D.
Bäuerle
,
J. B.
Hertzberg
, and
K. C.
Schwab
,
Appl. Phys. Lett.
89
,
223101
(
2006
).
11.
G. D.
Cole
,
S.
Gröblacher
,
K.
Gugler
,
S.
Gigan
, and
M.
Aspelmeyer
,
Appl. Phys. Lett.
92
,
261108
(
2008
).
12.
S.
Gröblacher
,
S.
Gigan
,
H. R.
Böhm
,
A.
Zeilinger
, and
M.
Aspelmeyer
,
EPL
81
,
54003
(
2008
).
13.
R.
Magnusson
and
S.
Wang
,
Appl. Phys. Lett.
61
,
1022
(
1992
).
14.
A.
Sharon
,
D.
Rosenblatt
, and
A. A.
Friesem
,
J. Opt. Soc. Am. A
14
,
2985
(
1997
).
15.
S.
Fan
and
J. D.
Joannopoulos
,
Phys. Rev. B
65
,
235112
(
2002
).
16.
C.
Mateus
,
M.
Huang
,
Y.
Deng
,
A.
Neureuther
, and
C.
Chang-Hasnain
,
IEEE Photon. Technol. Lett.
16
,
518
(
2004
).
17.
P.
Lalanne
,
J. P.
Hugonin
, and
P.
Chavel
,
J. Lightwave Technol.
24
,
2442
(
2006
).
18.
M. C.
Huang
,
Y.
Zhou
, and
C. J.
Chang-Hasnain
,
Nat. Photonics
1
,
119
(
2007
).
19.
F.
Brückner
,
D.
Friedrich
,
T.
Clausnitzer
,
M.
Britzger
,
O.
Burmeister
,
K.
Danzmann
,
E.
Kley
,
A.
Tünnermann
, and
R.
Schnabel
,
Phys. Rev. Lett.
104
,
163903
(
2010
).
20.
M. G.
Moharam
and
T. K.
Gaylord
,
J. Opt. Soc. Am.
71
,
811
(
1981
).
21.
T.
Germer
, MIST: Modeled integrated scatter tool, version 3.01 (available as a free download from NIST,
2008
).
22.
H.
Kogelnik
and
T.
Li
,
Proc. IEEE
54
,
1312
(
1966
).
23.
A.
Siegman
,
Lasers
(
University Science Books
,
Sausalito
,
1986
).
24.
S.
Timoshenko
,
Vibration Problems in Engineering
(
D. Van Nostrand Company
,
New York
,
1937
).
You do not currently have access to this content.