To analyze the sheath width effect on the determination of the plasma frequency in the cutoff probe, two simulations (a simplified circuit simulation and an E/M simulation) were conducted. Both two simulations showed a consistent result: the cutoff frequency , which is selected as a frequency of minimum peak in a transmission microwave frequency (TMF) spectrum, deviates from the plasma frequency while increasing the sheath width on the two probe tips. The physics behind the movement of cutoff frequency in the TMF spectrum deviating from the plasma frequency was analyzed and discussed in this paper. This study can provide not only the basis for the precise measurement of the cutoff probe but also the discernible boundary conditions for the cutoff probe application.
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11 June 2012
Research Article|
June 14 2012
Sheath width effect on the determination of plasma frequency in the cutoff probe
D. W. Kim;
D. W. Kim
1Center for Vacuum Technology,
Korea Research Institute of Standards and Science
, Daejeon 305‐306, South Korea
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S. J. You;
S. J. You
a)
1Center for Vacuum Technology,
Korea Research Institute of Standards and Science
, Daejeon 305‐306, South Korea
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J. H. Kim;
J. H. Kim
1Center for Vacuum Technology,
Korea Research Institute of Standards and Science
, Daejeon 305‐306, South Korea
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H. Y. Chang;
H. Y. Chang
2Department of Physics,
Korea Advanced Institute of Science and Technology
, Daejeon 305‐701, South Korea
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W. Y. Oh
W. Y. Oh
3Department of Mechanical Engineering,
Korea Advanced Institute of Science and Technology
, Daejeon 305-701, South Korea
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a)
email: [email protected].
Appl. Phys. Lett. 100, 244107 (2012)
Article history
Received:
March 21 2012
Accepted:
May 29 2012
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Citation
D. W. Kim, S. J. You, J. H. Kim, H. Y. Chang, W. Y. Oh; Sheath width effect on the determination of plasma frequency in the cutoff probe. Appl. Phys. Lett. 11 June 2012; 100 (24): 244107. https://doi.org/10.1063/1.4729442
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