Graphene nanoribbon (GNR) field-effect transistors (FETs) with widths down to 12 nm have been fabricated by electron beam lithography using a wafer-scale chemical vapor deposition (CVD) process to form the graphene. The GNR FETs show drain-current modulation of approximately 10 at 300 K, increasing to nearly 106 at 4 K. The strong temperature dependence of the minimum current indicates the opening of a bandgap for CVD-grown GNR-FETs. The extracted bandgap is estimated to be around 0.1 eV by differential conductance methods. This work highlights the development of CVD-grown large-area graphene and demonstrates the opening of a bandgap in nanoribbon transistors.

1.
K. S.
Novoselov
,
A. K.
Geim
,
S. V.
Morozov
,
D.
Jiang
,
Y.
Zhang
,
S. V.
Dubonos
,
I. V.
Grigorieva
, and
A. A.
Firsov
,
Science
306
,
666
(
2004
).
2.
F.
Schwierz
,
Nature (London)
472
,
41
(
2011
).
3.
K. V.
Emtsev
,
A.
Bostwick
,
K.
Horn
,
J.
Jobst
,
G. L.
Kellogg
,
L.
Ley
,
J. L.
McChesney
,
T.
Ohta
,
S. A.
Reshanov
,
J.
Röhrl
,
E.
Rotenberg
,
A. K.
Schmid
,
D.
Waldmann
,
H. B.
Weber
, and
T.
Seyller
,
Nature Mater.
8
,
203
(
2009
).
4.
W. A.
de Heer
 et al.,
Solid State Commun.
143
,
92
(
2007
).
5.
X.
Li
,
W.
Cai
,
J.
An
,
S.
Kim
,
J.
Nah
,
D.
Yang
,
R.
Piner
,
A.
Velamakanni
,
I.
Jung
,
E.
Tutuc
,
S. K.
Banerjee
,
L.
Colombo
, and
R. S.
Ruoff
,
Science
324
,
1312
(
2009
).
6.
S.-J.
Han
,
A.
Valdes-Garcia
,
A. A.
Bol
,
A. D.
Franklin
,
D.
Farmer
,
E.
Kratschmer
,
K. A.
Jenkins
, and
W.
Haensch
, in
IEEE International Electron Devices Meeting
(
IEEE
,
Piscataway, NJ
,
2011
), pp.
2
2
2
2
2
4
.
7.
Q.
Zhang
,
T.
Fang
,
H.
Xing
,
A.
Seabaugh
, and
D.
Jena
,
IEEE Electron Device Lett.
29
,
1344
(
2008
).
8.
K.
Wakabayashi
,
M.
Fujita
,
H.
Ajiki
, and
M.
Sigrist
,
Phys. Rev. B
59
,
8271
(
1999
).
9.
M. Y.
Han
,
B.
Ozyilmaz
,
Y.
Zhang
, and
P.
Kim
,
Phys. Rev. Lett.
98
,
206805
(
2007
).
10.
M. Y.
Han
,
J. C.
Brant
, and
P.
Kim
,
Phys. Rev. Lett.
104
,
056801
(
2010
).
11.
Y.
Wu
,
Y.-M.
Lin
,
A. A.
Bol
,
K. A.
Jenkins
,
F.
Xia
,
D. B.
Farmer
,
Y.
Zhu
, and
P.
Avouris
,
Nature (London)
472
,
74
(
2011
).
12.
W. S.
Hwang
,
K.
Tahy
,
R. L.
Myers-Ward
,
P. M.
Campbell
,
C. R.
Eddy
 Jr.
,
D. K.
Gaskill
,
H.
Xing
,
A. C.
Seabaugh
, and
D.
Jena
,
J. Vac. Sci. Technol. B
30
,
03D104
1
(
2012
).
13.
Z.
Chen
,
Y.-M.
Lin
,
M. J.
Rooks
, and
P.
Avouris
,
Physica E
40
,
228
(
2007
).
14.
L.
Brey
and
H. A.
Fetig
,
Phys. Rev. B
73
,
235411
(
2006
).
15.
M.
Yamamoto
and
K.
Wakabayashi
,
Nanoscale
4
,
1138
(
2012
).
16.
A. D.
Liao
,
J. Z.
Wu
,
X.
Wang
,
K.
Tahy
,
D.
Jean
,
H.
Dai
, and
E.
Pop
,
Phys. Rev. Lett.
106
,
256
(
2011
).
17.
K.
Todd
,
H.-T.
Chou
,
S.
Amasha
, and
D.
Goldhaber-Gordon
,
Nano Lett.
9
,
416
(
2009
).
18.
F.
Molitor
,
A.
Jacobsen
,
C.
Stampfer
,
J.
Guttinger
,
T.
Ihn
, and
K.
Ensslin
,
Phys. Rev. B
79
,
075426
(
2009
).
You do not currently have access to this content.