Performance degradation due to interfacial traps is generally considered as one of the main challenges for III-V metal-oxide-semiconductor field-effect-transistors (MOSFETs). In this work, we have investigated the suppression of interface state response using band engineering in III-V quantum well MOSFETs and experimentally verified the concept in the antimonide materials system using a gate-stack consisting of Al2O3/GaSb/InAlSb. It is shown that if the thickness of the interfacial layer of GaSb is scaled down to a few monolayers, the effective bandgap of the interfacial layer increases dramatically due to quantum confinement, which leads to the suppression of interface-trap response.
REFERENCES
1.
H.
Zhao
, Y.
Chen
, J. H.
Yum
, Y.
Wang
, F.
Zhou
, F.
Xue
, and J. C.
Lee
, Appl. Phys. Lett.
96
, 102101
(2010
).2.
F.
Xue
, H.
Zhao
, Y.
Chen
, Y.
Wang
, F.
Zhou
, and J. C.
Lee
, Appl. Phys. Lett.
98
, 082106
(2011
).3.
A.
Nainani
, T.
Irisawa
, Z.
Yuan
, Y.
Sun
, T.
Krishnamohan
, M.
Reason
, B. R.
Bennett
, J. B.
Boos
, M. G.
Ancona
, Y.
Nishi
, and K. C.
Saraswat
, Tech. Dig.- Int. Electron Devices Meet.
2010
, 138
.4.
B. R.
Bennett
, M. G.
Ancona
, J. B.
Boos
, C. B.
Canedy
, and S. A.
Khan
, J. Cryst. Growth
311
, 47
(2008
).5.
B. R.
Bennett
, M. G.
Ancona
, J. B.
Boos
, and B. V.
Shanabrook
, Appl. Phys. Lett.
91
, 042104
(2007
).6.
M.
Kobayashi
, G.
Thareja
, Y.
Sun
, N.
Goel
, M.
Garner
, W.
Tsai
, P.
Pianetta
, and Y.
Nishi
, Appl. Phys. Lett.
96
, 142906
(2010
).7.
Y.
Sun
, P.
Pianetta
, P.
Chen
, M.
Kobayashi
, Y.
Nishi
, N.
Goel
, M.
Garner
, and W.
Tsai
, Appl. Phys. Lett.
93
, 194103
(2008
).8.
A.
Nainani
, Y.
Sun
, T.
Irisawa
, Z.
Yuan
, M.
Kobayashi
, P.
Pianetta
, B. R.
Bennett
, J. B.
Boos
, and K. C.
Saraswat
, J. Appl. Phys.
109
, 114908
(2011
).9.
H.-S.
Kim
, I.
Ok
, M.
Zhang
, C.
Choi
, T.
Lee
, F.
Zhu
, G.
Thareja
, L.
Yu
, and J. C.
Lee
, Appl. Phys. Lett.
88
, 252906
(2006
).10.
S.
Koveshnikov
, W.
Tsai
, I.
Ok
, J. C.
Lee
, V.
Torkanov
, M.
Yakimov
, and S.
Oktyabrsky
, Appl. Phys. Lett.
88
, 022106
(2006
).11.
H.
Zhao
, D.
Shahrjerdi
, F.
Zhu
, M.
Zhang
, H.-S.
Kim
, I.
Ok
, J. H.
Yum
, S. I.
Park
, S. K.
Banerjee
, and J. C.
Lee
, Appl. Phys. Lett.
92
, 233508
(2008
).12.
M.
Yokoyama
, T.
Yasuda
, H.
Takagi
, N.
Miyata
, Y.
Urabe
, H.
Ishii
, H.
Yamada
, N.
Fukuhara
, M.
Hata
, M.
Sugiyama
, Y.
Nakano
, M.
Takenaka
, and S.
Takagi
, Appl. Phys. Lett.
96
, 142106
(2010
).13.
Y. C.
Chang
, C.
Merckling
, J.
Penaud
, C. Y.
Lu
, W.-E.
Wang
, J.
Dekoster
, M.
Meuris
, M.
Caymax
, M.
Heyns
, J.
Kwo
, and M.
Hong
, Appl. Phys. Lett.
97
, 112901
(2010
).14.
C.
Merckling
, X.
Sun
, A.
Alian
, G.
Brammertz
, V. V.
Afanas’ev
, T. Y.
Hoffmann
, M.
Heyns
, M.
Caymax
, and J.
Dekoster
, J. Appl. Phys.
109
, 073719
(2011
).15.
W.
Wang
, K.
Xiong
, R. M.
Wallace
, and K.
Cho
, J. Phys. Chem. C
114
, 22610
(2010
).16.
J.
Robertson
, Appl. Phys. Lett.
94
, 152104
(2009
).17.
A.
Nainani
, T.
Irisawa
, Z.
Yuan
, B. R.
Bennett
, J. B.
Boos
, Y.
Nishi
, and K. C.
Saraswat
, IEEE Trans. Electron Devices
58
, 3407
(2011
).18.
M.
Radosavljevic
, B.
C.-Kung
, S.
Corcoran
, G.
Dewey
, M. K.
Hudait
, J. M.
Fastenau
, J.
Kavalioros
, W. K.
Liu
, D.
Lubyshev
, M.
Metz
, K.
Millard
, N.
Mukherjee
, W.
Rachmady
, U.
Shah
, and R.
Chau
, Tech. Dig. - Int. Electron Devices Meet.
2009
, 319
.19.
A.
Nainani
, Z.
Yuan
, T.
Krishnamohan
, and K. C.
Saraswat
, in Proceedings of the International Simulation of Semiconductor Processes and Devices (SISPAD) Conference
(2010
), pp. 103
–106
.20.
A.
Ali
, H.
Madan
, A.
Agrawal
, I.
Ramirez
, R.
Misra
, J. B.
Boos
, B. R.
Bennett
, J.
Lindemuth
, and S.
Datta
, IEEE Electron Device Lett.
32
, 1689
(2011
).21.
J.-M.
Jancu
, R.
Scholz
, F.
Beltram
, and F.
Bassani
, Phys. Rev. B
57
, 6493
(1998
).22.
I.
Vurgaftman
and J. R.
Meyer
, J. Appl. Phys.
89
, 5815
(2001
).23.
S.
Lee
, F.
Oyafuso
, P.
von Allmen
, and G.
Klimeck
, Phys. Rev. B
69
, 045316
(2004
).24.
X.
Guan
and Z.
Yu
, IEEE Trans. Nanotechnol.
6
, 101
(2007
).25.
A.
Nainani
, Z.
Yuan
, T.
Krishnamohan
, Y.
Nishi
, K. C.
Saraswat
, B. R.
Bennett
, J. B.
Boos
, and M. G.
Ancona
, J. Appl. Phys.
110
, 014503
(2011
).26.
K.
Martens
, C. O.
Chui
, G.
Brammertz
, B.
De Jaeger
, D.
Kuzum
, M.
Meuris
, M.
Heyns
, T.
Krishnamohan
, K.
Saraswat
, H. E.
Maes
, and G.
Groeseneken
, IEEE Trans. Electron Devices
55
, 547
(2008
).© 2012 American Institute of Physics.
2012
American Institute of Physics
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