We report the development of a surface processing technique based on the optical breakdown of a microdroplet and subsequent ejection of a pulsed microjet. The microjet was sufficiently fast to remove nanoparticles from surfaces and erode most materials. The small volume of the droplet enabled precise and selective treatment of surfaces. When the jet was impinged onto a laser spot focused by the droplet, ablation rates substantially larger than those in conventional pulsed laser ablation were obtained with significantly reduced thermal effects. The jet could remove 20 nm particles and an oxide layer from solid surfaces by hydrodynamic impact only.
REFERENCES
1.
J. E.
Field
, Wear
233
, 1
(1999
).2.
R.
Gnanamoorthy
and A. S.
Grinspan
, Appl. Surf. Sci.
253
(2
), 989
(2006
).3.
T. A.
Taylor
, Surf. Coat. Technol.
76
(1–3
), 95
(1995
).4.
T.
Susuzlu
, A. M.
Hoogstrate
, and B.
Karpuschewski
, J. Mater. Process. Technol.
149
(1–3
), 30
(2004
).5.
E. J.
Speckmann
, R.
Kohling
, A.
Lucke
, H.
Straub
, W.
Wittkowski
, C. E.
Elger
, M.
Wiemann
, and D.
Bingmann
, J. Neurosci. Methods
82
(1
), 53
(1998
).6.
D. A.
Fletcher
and D. V.
Palanker
, Appl. Phys. Lett.
78
(13
), 1933
(2001
).7.
J.
Foldyna
, L.
Sitek
, J.
Ščučka
, P.
Martinec
, J.
Valíček
, and K.
Páleníková
, J. Mater. Process. Technol.
209
(20
), 6174
(2009
).8.
M. J.
Jackson
, J. Mater. Process. Technol.
191
(1–3
), 185
(2007
).9.
T.
Hirano
, M.
Komatsu
, H.
Uenohara
, A.
Takahashi
, K.
Takayama
, and T.
Yoshimoto
, Lasers Med. Sci.
17
(3
), 165
(2002
).10.
P.
Kafalas
and J.
Herrmann
, Appl. Opt.
12
(4
), 772
(1973
).11.
F.
Courvoisier
, V.
Boutou
, C.
Favre
, S. C.
Hill
, and J. P.
Wolf
, Opt. Lett.
28
(3
), 206
(2003
).12.
C.
Janzen
, R.
Fleige
, R.
Noll
, H.
Schwenke
, W.
Lahmann
, J.
Knoth
, P.
Beaven
, E.
Jantzen
, A.
Oest
, and P.
Koke
, Spectrochim. Acta, Part B
60
(7–8
), 993
(2005
).13.
J. C.
Carls
and J. R.
Brock
, Opt. Lett.
13
(4
), 273
(1988
).14.
D.
Jang
, J. G.
Park
, and D.
Kim
, J. Appl. Phys.
109
(7
), 073101
(2011
).15.
A.
Lindinger
, J.
Hagen
, L. D.
Socaciu
, T. M.
Bernhardt
, L.
Wöste
, D.
Duft
, and T.
Leisner
, Appl. Opt.
43
(27
), 5263
(2004
).16.
R. G.
Pinnick
, A.
Biswas
, R. L.
Armstrong
, S. G.
Jennings
, J. D.
Pendleton
, and G.
Fernáandez
, Appl. Opt.
29
(7
), 918
(1990
).17.
W. F.
Hsieh
, J. H.
Eickmans
, and R. K.
Chang
, J. Opt. Soc. Am. B
4
(11
), 1816
(1987
).18.
S. T.
Thoroddsen
, K.
Takehara
, T. G.
Etoh
, and C. D.
Ohl
, Phys. Fluids
21
, 112101
(2009
).19.
See supplementary material at http://dx.doi.org/10.1063/1.3692109 for experimental in detail and additional results.
20.
D.
Jang
, J. H.
Oh
, J. M.
Lee
, and D.
Kim
, J. Appl. Phys.
106
(1
), 014913
(2009
).21.
T. V.
Kononenko
, S. V.
Garnov
, S. M.
Klimentov
, V. I.
Konov
, E. N.
Loubnin
, F.
Dausinger
, A.
Raiber
, and C.
Taut
, Appl. Surf. Sci.
109–110
, 48
(1997
).22.
P. A.
Atanasov
, E. D.
Eugenieva
, and N. N.
Nedialkov
, J. Appl. Phys.
89
(4
), 2013
(2001
).23.
L.
Tunna
, A.
Kearns
, W.
O’Neill
, and C. J.
Sutcliffe
, Opt. Laser Technol.
33
(3
), 135
(2001
).24.
C. F.
Li
, D. B.
Johnson
, and R.
Kovacevic
, Int. J. Mach. Tools Manuf.
43
(9
), 925
(2003
).25.
S.
Zhu
, Y. F.
Lu
, and M. H.
Hong
, Appl. Phys. Lett.
79
(9
), 1396
(2001
).26.
D.
Kim
and H.
Lim
, ISIJ Int.
43
(8
), 1289
(2003
).27.
R.
Durham
, J.
Lacaze
, D.
Monceau
, and B.
Pieraggi
, Mater. Sci. Forum
369-372
, 181
(2001
).28.
R.
Allen Bowling
, J. Electrochem. Soc.
132
(9
), 2208
(1985
).29.
M.
Raudensky
, A.
Horak
, J.
Horsky
, M.
Pohanka
, and P.
Kotrbacek
, Rev. Metall./Cah. Inf. Tech.
104
(2
), 84
(2007
).30.
M. B.
Lesser
, Proc. R. Soc. London, Ser. A
377
(1770
), 289
(1981
).© 2012 American Institute of Physics.
2012
American Institute of Physics
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