We report on the effect of the substrate temperature on the growth dynamics and dielectric properties of BaTiO3 epitaxial films on Nb:SrTiO3 (001) substrates. By real-time reflection high energy electron diffraction analysis, we quantitatively estimated the adatoms surface diffusivity as a function of temperature. The increase of the substrate temperature promotes surface diffusion, which reflects in the improvement of BaTiO3 ferroelectric properties up to 680 °C. Above this temperature, Ba re-evaporation occurs, leading to a rapid deterioration of the dielectric and ferroelectric properties. This work shed light on thermally activated physical mechanisms which determine the ferroelectric properties of BaTiO3 films.
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