The spatial resolution attained by grating-based X-ray phase imaging is limited by the period of gratings to several microns. By compromising its wide field of view, it is possible to overcome the limitation by combining with an X-ray imaging microscope. In this study, we propose sub-period super-resolution X-ray phase imaging to overcome the spatial resolution limit but one that is compatible with a wide field of view. A non-self-imaging condition was adopted and a needle beam array was formed by a triangular phase grating. A sample was placed on the needle beam and scanned. The deflection of the needle beams was analyzed by an amplitude grating placed downstream with the process of the phase-stepping technique, and moiré images were recorded by an image detector located behind the amplitude grating. A super-resolution differential phase image was reconstructed for a test sample with a spatial resolution much smaller than the grating period. Although the problem of instability of the system remains, causing artifacts in the resultant image, the proof-of-concept of super-resolution X-ray phase imaging is demonstrated.
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27 September 2023
PROCEEDINGS OF THE 15TH INTERNATIONAL CONFERENCE ON X-RAY MICROSCOPY – XRM2022
19–24 June 2022
Hsinchu, Taiwan
Research Article|
September 27 2023
Development of grating-based super-resolution x-ray phase imaging Free
Atsushi Momose;
Atsushi Momose
a)
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
a)Corresponding author: [email protected]
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Zhuoxuan Zhao;
Zhuoxuan Zhao
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
2
Department of Materials Science, Graduate School of Engineering, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Ryosuke Ueda;
Ryosuke Ueda
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Mingjian Cai;
Mingjian Cai
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
2
Department of Materials Science, Graduate School of Engineering, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Hidekazu Takano;
Hidekazu Takano
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Yanlin Wu;
Yanlin Wu
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
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Katsumasa Ikematsu;
Katsumasa Ikematsu
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
4
Institute of Microstructure Technology, Karlsruhe Institute of Technology
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Hiroki Kawakami;
Hiroki Kawakami
3
Electron Tube Division, Hamamatsu Photonics K. K
., 314-5 Shimokanzo, Iwata, Shizuoka 438-0193, Japan
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Pouria Zangi;
Pouria Zangi
4
Institute of Microstructure Technology, Karlsruhe Institute of Technology
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Pascal Meyer;
Pascal Meyer
4
Institute of Microstructure Technology, Karlsruhe Institute of Technology
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
5
Karlsruhe Nano Micro Facility
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Martin Börner;
Martin Börner
4
Institute of Microstructure Technology, Karlsruhe Institute of Technology
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
5
Karlsruhe Nano Micro Facility
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
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Joachim Schulz
Joachim Schulz
6
Microworks GmbH
, Schnetzlerstr. 9, 76137 Karlsruhe, Germany
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Atsushi Momose
1,a)
Zhuoxuan Zhao
1,2
Ryosuke Ueda
1
Mingjian Cai
1,2
Hidekazu Takano
1
Yanlin Wu
1
Katsumasa Ikematsu
1,4
Hiroki Kawakami
3
Pouria Zangi
4
Pascal Meyer
4,5
Martin Börner
4,5
Joachim Schulz
6
1
Institute of Multidisciplinary Research for Advanced Materials, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
2
Department of Materials Science, Graduate School of Engineering, Tohoku University
, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan
4
Institute of Microstructure Technology, Karlsruhe Institute of Technology
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
3
Electron Tube Division, Hamamatsu Photonics K. K
., 314-5 Shimokanzo, Iwata, Shizuoka 438-0193, Japan
5
Karlsruhe Nano Micro Facility
, Hermann-von-HelmholtzPlatz 1, 76344 Eggenstein-Leopoldshafen, Germany
6
Microworks GmbH
, Schnetzlerstr. 9, 76137 Karlsruhe, Germany
a)Corresponding author: [email protected]
AIP Conf. Proc. 2990, 030003 (2023)
Citation
Atsushi Momose, Zhuoxuan Zhao, Ryosuke Ueda, Mingjian Cai, Hidekazu Takano, Yanlin Wu, Katsumasa Ikematsu, Hiroki Kawakami, Pouria Zangi, Pascal Meyer, Martin Börner, Joachim Schulz; Development of grating-based super-resolution x-ray phase imaging. AIP Conf. Proc. 27 September 2023; 2990 (1): 030003. https://doi.org/10.1063/5.0168794
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