In this work innovative additive printing methods for formation of polycrystalline silicon (poly-Si) and polycrystalline silicon carbide (poly-SiC) layers of local tunnel oxide passivating contacts (TOPCon) is evaluated. Replacement of conventional vacuum processes and vapor-phase deposition by additive printing of Si in fabrication process of high efficiency solar cells reduces processing complexity, and, hence manufacturing costs. Reliable inkjet- and FlexTrail-printing processes are developed for liquid-phase polysilane and organic polysilazane inks that are precursors of Si and SiC, respectively. FlexTrail is introduced as a potential technology to print uniform closed thin films of polysilane free of ruptures. Moreover, from inkjet-printing of the developed polysilane ink, homogenous, closed and crack free thin films of poly-Si are obtained after high temperature annealing. The polysilane ink is formulated considering evaluation of several solvents and photoinduced polymerization conditions. Inkjet-printing process development and optimization according to high frequency rheological characterization of organic polysilazane (OPSZ) is presented. Printed thin films are characterized after high temperature annealing (T = 950 °C, t = 60 min) to be uniform and free of micro cracks.
Inkjet- and flextrail-printing of silicon polymer-based inks for local passivating contacts
Zohreh Kiaee, Andreas Lösel, Christian Reichel, Ralph Müller, Milad Nazarzadeh, Mike Jahn, Rajveer Singh, Ise Uecker, Afnan Qazzazie, Torsten Hanf, Andreas Terfort, Max C. Holthausen, Thomas Hanemann, Roman Keding; Inkjet- and flextrail-printing of silicon polymer-based inks for local passivating contacts. AIP Conf. Proc. 24 August 2022; 2487 (1): 110002. https://doi.org/10.1063/5.0089256
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